Direct printing of 3D and curvilinear micrometer-sized architectures into solid substrates with sub-micrometer resolution

被引:41
作者
Campbell, Christopher J. [1 ]
Smoukov, Stoyan K. [1 ]
Bishop, Kyle J. M. [1 ]
Baker, Eric [1 ]
Grzybowski, Bartosz A. [1 ]
机构
[1] Northwestern Univ, Dept Chem & Biol Engn, Evanston, IL 60208 USA
关键词
D O I
10.1002/adma.200600716
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Micropatterned hydrogel stamps carrying etchant solutions are used to microstructure glass and silicon with complex 3D architectures (see figure and inside cover). A two-way reaction-diffusion mechanism initiated from the stamp enables direct printing of entire microdevices (left to right: two-level microfluidic channels, curvilinear microlenses in glass, nanostructured silicon) into solid substrates with resolution down to 300 nm.
引用
收藏
页码:2004 / +
页数:6
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