Fabrication of micro IC probe for LSI testing

被引：21

作者：

Takahiro, I ^{[1
]}

Sawada, R ^{[1
]}

Higurashi, E ^{[1
]}

机构：

[1] NTT, Telecommun Energy Labs, Musashino, Tokyo 1808585, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 80卷 / 02期

关键词：

micromachining; LSI testing; micro probe; test equipment;

D O I：

10.1016/S0924-4247(99)00257-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300 X 80 mu m, it is fabricated with a pitch of 100 mu m by micromachining techniques. Its contact resistance is less than 0.5 Ohm, satisfying the requirements for conventional probes, and its deflection is 2 to 8 mu m to accommodate height differences among LSI pads while maintaining contact. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：126 / 131

页数：6

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