Polar and nonpolar GaN grown by HVPE: Preferable substrates for nitride-based emitting devices

被引:13
作者
Paskova, T [1 ]
Paskov, PP
Valcheva, E
Darakchieva, V
Birch, J
Kasic, A
Arnaudov, B
Tungasmita, S
Monemar, B
机构
[1] Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden
[2] Univ Sofia, Fac Phys, BU-1164 Sofia, Bulgaria
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2004年 / 201卷 / 10期
关键词
D O I
10.1002/pssa.200404818
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report on hydride vapor phase epitaxial growth of thick nonpolar GaN films on r-plane sapphire in comparison with polar GaN films on c-plane sapphire substrates with AlN buffer layers, aiming at developing of their quasi-substrate application. Both the thick films and the buffers were identified to have single crystalline structures. The microstructure of the films was studied by transmission electron microscopy. High resolution X-ray diffraction mapping and photoluminescence measurements were employed to characterize the strain present in both polar and nonpolar GaN films. In contrast to c-plane GaN, which is always characterised by isotropic in-plane properties, the a-plane GaN shows a strong in-plane anisotropy of the growth rate, morphology and strain distribution. Different defect, impurity and free carrier concentrations were observed in the polar and nonpolar material.
引用
收藏
页码:2265 / 2270
页数:6
相关论文
共 18 条
[1]   Modeling of the free-electron recombination band in emission spectra of highly conducting n-GaN -: art. no. 045213 [J].
Arnaudov, B ;
Paskova, T ;
Goldys, EM ;
Evtimova, S ;
Monemar, B .
PHYSICAL REVIEW B, 2001, 64 (04)
[2]   Contribution of free-electron recombination to the luminescence spectra of thick GaN films grown by hydride vapor phase epitaxy [J].
Arnaudov, B ;
Paskova, T ;
Goldys, EM ;
Yakimova, R ;
Evtimova, S ;
Ivanov, IG ;
Henry, A ;
Monemar, B .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (11) :7888-7892
[3]  
Birch J, 2002, VACUUM SCIENCE AND TECHNOLOGY: NITRIDES AS SEEN BY THE TECHNOLOGY 2002, P421
[4]   Structural characterization of nonpolar (11(2)over-bar0) a-plane GaN thin films grown on (1(1)over-bar02) r-plane sapphire [J].
Craven, MD ;
Lim, SH ;
Wu, F ;
Speck, JS ;
DenBaars, SP .
APPLIED PHYSICS LETTERS, 2002, 81 (03) :469-471
[5]   Generalized infrared ellipsometry study of thin epitaxial AlN layers with complex strain behavior [J].
Darakchieva, V ;
Schubert, M ;
Birch, J ;
Kasic, A ;
Tungasmita, S ;
Paskova, T ;
Monemar, B .
PHYSICA B-CONDENSED MATTER, 2003, 340 :416-420
[6]   Characteristics of stacking faults in AlN thin films [J].
Dovidenko, K ;
Oktyabrsky, S ;
Narayan, J .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (09) :4296-4299
[7]   Structural and morphological characteristics of planar (11(2)over-bar0) a-plane gallium nitride grown by hydride vapor phase epitaxy [J].
Haskell, BA ;
Wu, F ;
Matsuda, S ;
Craven, MD ;
Fini, PT ;
DenBaars, SP ;
Speck, JS ;
Nakamura, S .
APPLIED PHYSICS LETTERS, 2003, 83 (08) :1554-1556
[8]   Defect reduction in (11(2)over-bar0) a-plane gallium nitride via lateral epitaxial overgrowth by hydride vapor-phase epitaxy [J].
Haskell, BA ;
Wu, F ;
Craven, MD ;
Matsuda, S ;
Fini, PT ;
Fujii, T ;
Fujito, K ;
DenBaars, SP ;
Speck, JS ;
Nakamura, S .
APPLIED PHYSICS LETTERS, 2003, 83 (04) :644-646
[9]   Free-carrier and phonon properties of n- and p-type hexagonal GaN films measured by infrared ellipsometry [J].
Kasic, A ;
Schubert, M ;
Einfeldt, S ;
Hommel, D ;
Tiwald, TE .
PHYSICAL REVIEW B, 2000, 62 (11) :7365-7377
[10]   Photoluminescence and reflectance spectroscopy of excitonic transitions in high-quality homoepitaxial GaN films [J].
Kornitzer, K ;
Ebner, T ;
Thonke, K ;
Sauer, R ;
Krichner, C ;
Schwegler, V ;
Kamp, M ;
Leszczynski, M ;
Grzegory, I ;
Porowski, S .
PHYSICAL REVIEW B, 1999, 60 (03) :1471-1473