The structural correlation and mechanical properties in amorphous hafnium oxide under pressure

被引:0
作者
Nguyen-Hoang Thoan [1 ]
Nguyen-Trung Do [1 ]
Nguyen-Ngoc Trung [1 ]
Le-Van Vinh [2 ]
机构
[1] Hanoi Univ Sci & Technol, Sch Engn Phys, 1 Dai Co Viet Rd, Hanoi 100000, Vietnam
[2] Phenikaa Univ, Hanoi 100000, Vietnam
来源
INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 2020年 / 34卷 / 22-24期
关键词
Amorphous hafnia; molecular dynamic; atomic structure; pressure; HFO2;
D O I
10.1142/S0217979220401499
中图分类号
O59 [应用物理学];
学科分类号
摘要
The classical molecular dynamics (MD) technique was used to investigate the atomistic structure of amorphous hafnium oxide (HfO2) under pressure. The local atomic structure and the liquid-solid transition of HfO2 were analyzed for the pair radical distribution functions, bond angle distributions and coordination number. The simulation reveals that although the fractions of structural units HfOx and OHfy strongly change with the density, the partial bond angle distributions of these structural units are almost identical for all constructed models. This result has enabled us to establish a relationship between the bond angle distributions and the fractions of structural units.
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页数:8
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共 13 条
[1]   Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition [J].
Berdova, Maria ;
Liu, Xuwen ;
Wiemer, Claudia ;
Lamperti, Alessio ;
Tallarida, Grazia ;
Cianci, Elena ;
Fanciulli, Marco ;
Franssila, Sami .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2016, 34 (05)
[2]   Molecular dynamics simulation of amorphous HfO2 for resistive RAM applications [J].
Broglia, G. ;
Ori, G. ;
Larcher, L. ;
Montorsi, M. .
MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING, 2014, 22 (06)
[3]  
Ceresoli D., 2006, PHYS REV B, V74, P5
[4]   First principles study of the structural, electronic, and dielectric properties of amorphous HfO2 [J].
Chen, Tsung-Ju ;
Kuo, Chin-Lung .
JOURNAL OF APPLIED PHYSICS, 2011, 110 (06)
[5]  
Demkov A.A., 2005, MAT FUNDAMENTALS GAT
[6]   The Structure of Liquid and Amorphous Hafnia [J].
Gallington, Leighanne C. ;
Ghadar, Yasaman ;
Skinner, Lawrie B. ;
Weber, J. K. Richard ;
Ushakov, Sergey V. ;
Navrotsky, Alexandra ;
Vazquez-Mayagoitia, Alvaro ;
Neuefeind, Joerg C. ;
Stan, Marius ;
Low, John J. ;
Benmore, Chris J. .
MATERIALS, 2017, 10 (11)
[7]   Molecular dynamics simulation of structural properties in amorphous HfO2 under cooling process [J].
Nguyen, Thoan H. ;
Le, Vinh V. ;
Nguyen, Trung N. .
VACUUM, 2019, 161 :251-258
[8]   Amorphous HfO2 and Hf1-xSixO via a melt-and-quench scheme using ab initio molecular dynamics [J].
Scopel, Wanderla L. ;
da Silva, Antonio J. R. ;
Fazzio, A. .
PHYSICAL REVIEW B, 2008, 77 (17)
[9]   Nanomechanical study of amorphous and polycrystalline ALD HfO2 thin films [J].
Tapily, K. ;
Jakes, J. E. ;
Gu, D. ;
Baumgart, H. ;
Elmustafa, A. A. .
INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING, 2011, 5 (2-3) :193-204
[10]   Unified interatomic potential and energy barrier distributions for amorphous oxides [J].
Trinastic, J. P. ;
Hamdan, R. ;
Wu, Y. ;
Zhang, L. ;
Cheng, Hai-Ping .
JOURNAL OF CHEMICAL PHYSICS, 2013, 139 (15)