A new design of a micro flow sensor for wide-range flow sensing

被引：0

作者：

Chung, Wan-Young ^{[1
]}

机构：

[1] Donseo Univ, Div Comp & Informat Engn, Pusan 617716, South Korea

来源：

JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2006年 / 49卷 / 03期

关键词：

micro sensor; flow sensor; thermal mass flow sensor; thermal simulation; FDM; GAS-SENSOR;

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A new 2-D silicon micro flow sensor structure with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measurement properties. The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with a typical sensor which has only a temperature sensing element on each side of a central heater. The central heater and the temperature detecting element pairs, 20 mu m in width, were patterned from a Pt/Ti(2000/300 angstrom) double layer, and the space distance from the central heater to the temperature sensors was 220 mu m. The suggested new micro flow sensor structure with triple temperature sensing elements on each side showed an accurate sensitivity over a very wide flow range from flow velocities of 0 to 2.0 m/sec.

引用

页码：1225 / 1228

页数：4

共 14 条

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