Characterization of an electro-thermal microactuator with multi-lateral motion in plane

We present a new electro-thermal microactuator to have multi-lateral motion in plane by only varying voltage potentials at the contact pads. To extend the operating function, the larger operating range or multi-mode switch, relay and optic tweezer can be achieved. For focusing on the characterization of the microactuator, the finite element software ANSYS is used to perform the electro-thermo-mechanical behaviors of the microactuator to demonstrate the feasibility of the design principle. Design parameters (including structural dimensions, selective doping and thermal boundary conditions) significantly influencing the performance are studied. According to the analysis results, it is found that low voltages (0similar to7V) are required to achieve displacements in microns with the operating temperatures below 300degreesC. The optimal structure can be obtained by varying geometric dimensions and resistivity of the beams to meet the proper performance.