On the design of an electrohydrodynamic ion-drag micropump

被引：0
作者：
Badran, M [1 ]
Moussa, M [1 ]
机构：
[1] Univ Guelph, Sch Engn, Guelph, ON N1G 2W1, Canada
来源：
2004 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS | 2004年
关键词：
electrohydrodynamic (EHD); ion-drag; IntelliSuite; micropump;
D O I：
10.1109/ICMENS.2004.1508934
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, several designs of an Electrohydrodynamic (EHD) Ion-Drag Micropump will be investigated. The goal is to determine the effect of several design parameters on the pressure-voltage relationship. The overall dimensions of the micropump channel are 500 mum x 480 mum x 60 mum. Four designs were tested in simulation with different combinations of the gap between the electrodes (S) and the gap between the electrode pairs (D) to examine their impact on the pumping performance. The design with small gap (S) and large gap (D) was found to have the best pumping performance.
引用
收藏
页码：137 / 140
页数：4
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