GaN epitaxial growth on neodium gallate substrates

被引:19
|
作者
Okazaki, H
Arakawa, A
Asahi, T
Oda, O
Aiki, K
机构
关键词
D O I
10.1016/S0038-1101(96)00213-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have investigated the feasibility of neodium gallate (NdGaO3, NGO) as substrates for GaN epitaxial growth for the first time. GaN films deposited on neodium gallate substrates by the hydride vapor phase epitaxy technique have been found to be single-crystalline with the epitaxial relationship of GaN(0001)/NGO(011) and GaN[<10(1)over bar 0>]parallel to NGO[100], where the lattice mismatch between the film and the substrate is less than 2%. Photoluminescence (PL) of GaN/NGO films at room temperature showed a strong band edge emission with little emission in the longer wavelength region. The carrier concentration and the electronmobility of GaN/NGO films were 7 x 10(19) cm(-3) and 45 cm(2)/Vs, respectively. These results are superior to those of GaN/sapphire films deposited simultaneously under the same conditions. (C) 1997 Elsevier Science Ltd.
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页码:263 / 266
页数:4
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