GaN epitaxial growth on neodium gallate substrates

被引:19
|
作者
Okazaki, H
Arakawa, A
Asahi, T
Oda, O
Aiki, K
机构
关键词
D O I
10.1016/S0038-1101(96)00213-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have investigated the feasibility of neodium gallate (NdGaO3, NGO) as substrates for GaN epitaxial growth for the first time. GaN films deposited on neodium gallate substrates by the hydride vapor phase epitaxy technique have been found to be single-crystalline with the epitaxial relationship of GaN(0001)/NGO(011) and GaN[<10(1)over bar 0>]parallel to NGO[100], where the lattice mismatch between the film and the substrate is less than 2%. Photoluminescence (PL) of GaN/NGO films at room temperature showed a strong band edge emission with little emission in the longer wavelength region. The carrier concentration and the electronmobility of GaN/NGO films were 7 x 10(19) cm(-3) and 45 cm(2)/Vs, respectively. These results are superior to those of GaN/sapphire films deposited simultaneously under the same conditions. (C) 1997 Elsevier Science Ltd.
引用
收藏
页码:263 / 266
页数:4
相关论文
共 50 条
  • [1] Epitaxial growth of GaN on copper substrates
    Inoue, S.
    Okamoto, K.
    Matsuki, N.
    Kim, Tae-Won
    Fujioka, H.
    APPLIED PHYSICS LETTERS, 2006, 88 (26)
  • [2] Epitaxial Growth of GaN on Patterned Sapphire Substrates
    Tadatomo, Kazuyuki
    III-NITRIDE BASED LIGHT EMITTING DIODES AND APPLICATIONS, 2ND EDITION, 2017, 133 : 69 - 92
  • [3] Growth of GaN on lithium gallate substrates for development of a GaN thin compliant substrate
    Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1998, 16 (03):
  • [4] Growth of GaN on lithium gallate substrates for development of a GaN thin compliant substrate
    Doolittle, WA
    Kropewnicki, T
    Carter-Coman, C
    Stock, S
    Kohl, P
    Jokerst, NM
    Metzger, RA
    Kang, S
    Lee, K
    May, G
    Brown, AS
    NITRIDE SEMICONDUCTORS, 1998, 482 : 283 - 288
  • [5] Growth of GaN on lithium gallate substrates for development of a GaN thin compliant substrate
    Doolittle, WA
    Kropewnicki, T
    Carter-Coman, C
    Stock, S
    Kohl, P
    Jokerst, NM
    Metzger, RA
    Kang, S
    Lee, KK
    May, G
    Brown, AS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (03): : 1300 - 1304
  • [6] Epitaxial growth of GaN films on silicon substrates by MOVPE
    Yokouchi, K
    Araki, T
    Nagatomo, T
    Omoto, O
    SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 867 - 870
  • [7] Epitaxial growth of GaN films on unconventional oxide substrates
    Wang, Wenliang
    Yang, Weijia
    Wang, Haiyan
    Li, Guoqiang
    JOURNAL OF MATERIALS CHEMISTRY C, 2014, 2 (44) : 9342 - 9358
  • [8] Epitaxial growth of GaN films on unconventional oxide substrates
    Wang, Wenliang
    Yang, Weijia
    Wang, Haiyan
    Li, Guoqiang
    Journal of Materials Chemistry C, 2014, 2 (44): : 9342 - 9358
  • [9] Substrates with Diamond Heat Sink for Epitaxial GaN Growth
    I. O. Maiboroda
    I. A. Chernykh
    V. S. Sedov
    A. S. Altakhov
    A. A. Andreev
    Yu. V. Grishchenko
    E. M. Kolobkova
    A. K. Mart’yanov
    V. I. Konov
    M. L. Zanaveskin
    Technical Physics Letters, 2021, 47 : 353 - 356
  • [10] Substrates with Diamond Heat Sink for Epitaxial GaN Growth
    Maiboroda, I. O.
    Chernykh, I. A.
    Sedov, V. S.
    Altakhov, A. S.
    Andreev, A. A.
    Grishchenko, Yu, V
    Kolobkova, E. M.
    Mart'yanov, A. K.
    Konov, V., I
    Zanaveskin, M. L.
    TECHNICAL PHYSICS LETTERS, 2021, 47 (05) : 353 - 356