Pd-catalyzed hydrogen sensing with InN nanobelts

被引:6
|
作者
Wright, J. S. [1 ]
Lim, Wantae [1 ]
Gila, B. P. [1 ]
Pearton, S. J. [1 ]
Ren, F. [2 ]
Lai, Wei-Ta [3 ]
Chen, Li-Chyong [3 ]
Hu, Ming-Shien [4 ]
Chen, Kuei-Hsien [4 ]
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
[3] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 106, Taiwan
[4] Acad Sinica, Inst Atom & Mol Sci, Taipei 106, Taiwan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2009年 / 27卷 / 03期
关键词
dissociation; gas sensors; hydrogen; III-V semiconductors; indium compounds; nanosensors; nanostructured materials; ohmic contacts; palladium; wide band gap semiconductors; ROOM-TEMPERATURE; ZNO NANOWIRES; CARBON NANOTUBES; SENSORS; FABRICATION; TRANSPORT; SURFACE;
D O I
10.1116/1.3125267
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The use of Pd coatings on multiple InN nanobelts is shown to enhance their sensitivity for hydrogen sensing at hundreds of ppm level at 25 degrees C. Without the metal coating to catalyze dissociation of the hydrogen molecules, the InN nanobelts with Ohmic contacts at either end showed no detectable change in current when exposed to hydrogen under the same conditions. Moreover, the Pd-coated InN showed no response to CO2, C2H6, NH3, and O-2 (all in N-2 ambient). The relative resistance change in the Pd-coated sensors was not linearly dependent on the hydrogen concentration at dilute levels, i.e., 8% at 100 ppm H-2 and 9.5% at 1000 ppm H-2. The recovery characteristics of the sensors at room temperature after hydrogen sensing were also examined and similar to 50% of the initial InN resistance was recovered 10 min after sensor exposure to air. At higher temperatures, larger resistance changes and faster response and recovery were obtained. Pd-coated InN nanobelt sensors displayed much higher relative response than Pt-coated sensors.
引用
收藏
页码:L8 / L10
页数:3
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