Nano-structure of GdF3 thin film evaluated by variable angle spectroscopic ellipsometry

被引:0
|
作者
Wang, Jue [1 ]
Maier, Robert [1 ]
Dewa, Paul G. [1 ]
Schreiber, Horst [1 ]
Bellman, Robert A. [2 ]
Elli, David Dawson [2 ]
机构
[1] Corning Tropel Corp, Fairport, NY 14450 USA
[2] Corning Inc, Corning, NY 14831 USA
来源
NANOPHOTONIC MATERIALS III | 2006年 / 6321卷
关键词
GdF3 thin film; nano-porous structure; optical property; spectroscopic ellipsometry;
D O I
10.1117/12.677538
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
As excimer lasers extend to deep-ultraviolet and vacuum-ultraviolet wavelengths at 193nm and 157nm, optical coatings experience the challenge of eliminating possible environmental contamination, reducing scattering loss, and increasing laser irradiation durability. Wide band-gap metal fluorides become the materials of choice for the laser optics applications. In order to understand the optical properties of nanostructured fluoride films, thin GdF3 films grown on CaF2 (111) substrates were evaluated by variable angle spectroscopic ellipsometry. An effective medium approximation model was used to determine both the film porosity and the surface roughness. Structural evolution of the GdF3 film was revealed with improved ellipsometric modeling, suggesting the existence of 3-layer structure, a densified bottom layer, a porous middle layer and a rough top surface. The nanostructure of the film and the surface roughness were confirmed by atomic force microscopy. The attraction of the nano-structure to environmental contamination was experimentally demonstrated.
引用
收藏
页数:10
相关论文
共 50 条
  • [31] Refractive index and thickness analysis of natural silicon dioxide film growing on silicon with variable-angle spectroscopic ellipsometry
    Chen, Yanyan
    Jin, Gang
    SPECTROSCOPY, 2006, 21 (10) : 26 - +
  • [32] Optical properties of Cd1-xZnxTe films in a device structure using variable angle spectroscopic ellipsometry
    Paulson, P.D. (pdp@udel.edu), 1600, American Institute of Physics Inc. (95):
  • [33] Optical dispersion analysis of TiO2 thin films based on variable-angle spectroscopic ellipsometry measurements
    Mardare, D
    Hones, P
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 68 (01): : 42 - 47
  • [34] Influence of Oblique Angle Deposition on the Nano-structure and Characteristics of ZnO Thin Films Produced by Annealing of Zn Films
    Hadi Savaloni
    Neda Abbaszadeh
    Journal of Electronic Materials, 2016, 45 : 3343 - 3355
  • [35] Influence of Oblique Angle Deposition on the Nano-structure and Characteristics of ZnO Thin Films Produced by Annealing of Zn Films
    Savaloni, Hadi
    Abbaszadeh, Neda
    JOURNAL OF ELECTRONIC MATERIALS, 2016, 45 (07) : 3343 - 3355
  • [36] Optical properties of Cd1-xZnxTe films in a device structure using variable angle spectroscopic ellipsometry
    Paulson, PD
    McCandless, BE
    Birkmire, RW
    JOURNAL OF APPLIED PHYSICS, 2004, 95 (06) : 3010 - 3019
  • [37] SPECTROSCOPIC ELLIPSOMETRY ANALYSIS OF A ANTIMONY TRISULFIDE (Sb2S3) THIN FILM
    Drissi, N.
    Nouira, W.
    Gassoumi, M.
    CHALCOGENIDE LETTERS, 2020, 17 (09): : 461 - 468
  • [38] Temperature dependence of the electronic transitions in BiFeO3 thin film studied by spectroscopic ellipsometry
    Kang, T. D.
    Jeon, B. C.
    Moon, S. J.
    JOURNAL OF APPLIED PHYSICS, 2015, 117 (13)
  • [39] Influence of the indium on the structure and the optical properties of the ZnO thin film: Kramer kronig relation and the spectroscopic ellipsometry
    Aboraia, Abdelaziz M.
    Ezzeldien, Mohammed
    Ali, H. Elhosiny
    Yahia, I. S.
    Khairy, Yasmin
    Ganesh, V
    Soldatov, Alexander, V
    Shaaban, E. R.
    MATERIALS LETTERS, 2021, 283
  • [40] Surface and cross sectional nano-structure of prototype BPM prepared using imprinted glassy alloy thin film
    Saidoh, Noriko
    Takenaka, Kana
    Nishiyama, Nobuyuki
    Ishimaru, Manabu
    Inoue, Akihisa
    INTERMETALLICS, 2012, 30 : 48 - 50