The development of a 200 kV monochromated field emission electron source

被引：33

作者：

Mukai, Masaki ^{[1
]}

Kim, Judy S. ^{[2
]}

Omoto, Kazuya ^{[1
]}

Sawada, Hidetaka ^{[1
]}

Kimura, Atsushi ^{[1
]}

Ikeda, Akihiro ^{[1
]}

Zhou, Jun ^{[1
]}

Kaneyama, Toshikatsu ^{[1
]}

Young, Neil P. ^{[2
]}

Warner, Jamie H. ^{[2
]}

Nellist, Peter D. ^{[2
]}

Kirkland, Angus I. ^{[2
]}

机构：

[1] JEOL Ltd, Akishima, Tokyo 1968558, Japan

[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

来源：

ULTRAMICROSCOPY | 2014年 / 140卷

关键词：

Monochromator; Wien filter; Aberration correction; Electron energy-loss spectroscopy; High-resolution imaging; Energy resolution; ENERGY-LOSS SPECTROSCOPY; RETARDING WIEN FILTER; ABERRATION ANALYSIS; MICROSCOPY;

D O I：

10.1016/j.ultramic.2014.02.004

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We report the development of a monochromator For an intermediate-voltage aberration-corrected electron microscope suitable For operation in both STEM and TEM imaging modes. The monochromator consists of two Wien filters with a variable energy selecting slit located between them and is located prior to the accelerator. The second filter cancels the energy dispersion produced by the first filter and after energy selection Forms a round monochromatecl, achromatic probe at the specimen plane. The ultimate achievable energy resolution has been measured as 36 meV at 200 kV and 26 meV at 80 kV. High-resolution Annular Dark Field STEM images recorded using a monochromated probe resolve Si-Si spacings of 135.8 pm using energy spreads of 218 meV at 200 kV and 217 meV at 801(V respectively. In TEM mode an improvement in non-linear spatial resolution to 64 pm due to the reduction in the effects of partial temporal coherence has been demonstrated using broad beam illumination with an energy spread of 134 meV at 200 kV. (C) 2014 Elsevier B.V. All rights reserved

引用

页码：37 / 43

页数：7

共 31 条

[1] Quantification of the Information Limit of Transmission Electron Microscopes [J].