Femtosecond Laser Repairing of the Defects in Glass Materials Induced by Ion Implantation

被引：0
作者：
Cao, Qiang [1 ]
Zhang, Jiajun [1 ]
机构：
[1] Beijing Inst Technol, Sch Mech Engn, Laser Micro Nano Fabricat Lab, Beijing 100081, Peoples R China
来源：
2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2015年
关键词：
NONLINEAR-OPTICAL PROPERTIES; CURRENT CU-IMPLANTATION; SILICA GLASS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Metal ion implantation in glass causes lots of defects in lattice during its fabricating process. We found that the femtosecond laser irradiation have a great efficiency to repair these defects with high spatial selectivity.
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页数：2
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