Optical and electrical properties of different oriented CVD diamond films

被引：7
作者：
Su, Qingfeng [1 ]
Xia, Yiben [1 ]
Wang, Linjun [1 ]
Liu, Jianmin [1 ]
Shi, Weimin [1 ]
机构：
[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2006年 / 252卷 / 23期
基金：
中国国家自然科学基金;
关键词：
CVD diamond film; oriented growth; optical properties; electrical properties;
D O I：
10.1016/j.apsusc.2005.10.048
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Due to different oriented diamond films having different properties, in this paper optical and electrical properties of different oriented diamond films have been investigated. The measured results indicate diamond films are of high quality and the properties of the (001)-oriented diamond film are better than those of the (111)-oriented one. Refractive index and extinction coefficient of (001)-oriented diamond film in the wavelength range of 2.5-12.5 mu m is 2.391 and in the order of 10(-5), respectively. And for the (111)-oriented one it is 2.375 and in the order of 10(-4). The dark current of the (001)-oriented diamond film is 33.7 nA under an applied electric field of 100 kV/cm. The resistivity of the (001)-oriented diamond film obtained is about 2.33 x 10(10) Omega cm. The current of (001)-oriented diamond film is almost no change with the time testing. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：8239 / 8242
页数：4
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