Heterodyne moire interferometry in micro-metrology

被引：0

作者：

Qin, YW ^{[1
]}

Yan, CX ^{[1
]}

Ji, XH ^{[1
]}

Guo, GP ^{[1
]}

机构：

[1] Tianjin Univ, Dept Mech, Tianjin 300072, Peoples R China

来源：

THIRD INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS | 2002年 / 4537卷

关键词：

heterodyne moire interferometry; nanometer measurement; micro-metrology;

D O I：

10.1117/12.468843

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

By modifying the hardware of a heterodyne moire interferometer (HMI), the measurement range, accuracy and efficiency of the new system can be improved significantly. With this new system whole-field measurement of displacements and strains can be achieved by translating the photodetectors. Test results have demonstrated that this new HMI system is potentially a good alternative tool for micro-metrology.

引用

页码：281 / 284

页数：4

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