Heterodyne moire interferometry in micro-metrology

被引：0
|
作者：
Qin, YW [1 ]
Yan, CX [1 ]
Ji, XH [1 ]
Guo, GP [1 ]
机构：
[1] Tianjin Univ, Dept Mech, Tianjin 300072, Peoples R China
来源：
THIRD INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS | 2002年 / 4537卷
关键词：
heterodyne moire interferometry; nanometer measurement; micro-metrology;
D O I：
10.1117/12.468843
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
By modifying the hardware of a heterodyne moire interferometer (HMI), the measurement range, accuracy and efficiency of the new system can be improved significantly. With this new system whole-field measurement of displacements and strains can be achieved by translating the photodetectors. Test results have demonstrated that this new HMI system is potentially a good alternative tool for micro-metrology.
引用
收藏
页码：281 / 284
页数：4
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