A distributed temperature-control system for a single-crystal growth apparatus

被引:2
|
作者
Vlezko, VA [1 ]
Kokh, AE [1 ]
机构
[1] Russian Acad Sci, Inst Mineral & Petrog, Siberian Div, Novosibirsk 630058, Russia
关键词
Physical Chemistry; Ambient Temperature; Absolute Error; Control Accuracy; Heat Regulator;
D O I
10.1023/B:INET.0000038410.09239.07
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A distributed precision heat regulator designed for use in a single-crystal growth apparatus is described. The regulator is based on an S-type thermocouple and provides a temperature range of up to 1300degreesC with an absolute error of <0.6°C, a preset-temperature control accuracy of ∼0.1°C, and a temperature drift of 0.05°C/°C ambient temperature or lower.
引用
收藏
页码:562 / 566
页数:5
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