A Novel Microfabrication Technology of Planar Microstrip Slow-Wave Structures for Millimeter-Band Traveling-Wave Tubes

被引：0
|
作者：
Starodubov, Andrey V. [1 ,2 ]
Serdobintsev, Alexey A. [1 ]
Pavlov, Anton M. [1 ]
Galushka, Victor V. [1 ]
Mitin, Dmitry M. [1 ]
Ryskin, Nikita M. [1 ,2 ]
机构：
[1] Saratov NG Chernyshevskii State Univ, 83 Astrakhanskaya St, Saratov 410012, Russia
[2] VA Kotelnikov Inst Radio Engn & Elect RAS, Saratov Branch, Micro & Nanoelect Lab, 38 Zelyonaya St, Saratov 410019, Russia
来源：
2018 IEEE INTERNATIONAL VACUUM ELECTRONICS CONFERENCE (IVEC) | 2018年
基金：
俄罗斯科学基金会;
关键词：
slow wave structure; meander line; dielectric substrate; traveling wave tube; laser ablation; magnetron sputtering; microfabrication;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel technology for microfabrication of millimeter-band planar microstrip slow-wave structures (SWS) is proposed. The technology is based on magnetron sputtering and laser ablation methods. The magnetron sputtering method is used to deposit a thin layer of metal (copper) on a quartz substrate. Then laser ablation is utilized to cut a slow wave structure from the copper layer. V-band (50-70 GHz) meander-line SWSs were fabricated and characterized by scanning electron and optical microscopy. The proposed technology has significant advantages in cost, speed and flexibility over lithography processes commonly utilized for such applications.
引用
收藏
页码：333 / +
页数：2
相关论文
共 50 条
  • [1] Studies on Millimeter-band Low-Voltage Traveling-Wave Tubes with Planar Meander-Line Slow-Wave Structures
    Starodubov, Andrei
    Pavlov, Anton
    Galushka, Viktor
    Serdobintsev, Alexey
    Kozhevnikov, Ilya
    Bessonov, Dmitry
    Torgashov, Roman
    Rozhnev, Andrey
    Ryskin, Nikita
    Molchanov, Sergei
    Bakhteev, Igor
    Ulisse, Giacomo
    Krozer, Viktor
    2020 IEEE 21ST INTERNATIONAL CONFERENCE ON VACUUM ELECTRONICS (IVEC 2020), 2020, : 325 - 326
  • [2] Development of Miniaturized Traveling-Wave Tubes With Planar Microstrip Slow-Wave Structures on Dielectric Substrates
    Rvskin, N. M.
    Torgashov, R. A.
    Torgashov, G., V
    Rozhnev, A. G.
    Starodubov, A., V
    Serdobintsev, A. A.
    Pavlov, A. M.
    Galushka, V. V.
    Burtsev, A. A.
    Navrotskiy, I. A.
    Ulisse, G.
    Krozer, V
    2020 33RD INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2018, : 27 - 28
  • [3] Development of a Low-Voltage Millimeter-Band Traveling-Wave Tube With a Planar Microstrip Slow-Wave Structure on Dielectric Substrate
    Torgashov, Roman A.
    Starodubov, Andrey, V
    Rozhnev, Andrey G.
    Ryskin, Nikita M.
    Galushka, Viktor V.
    Serdobintsev, Alexey A.
    Pavlov, Anton M.
    Ulisse, Giacomo
    Krozer, Viktor
    IVEC 2021: 2021 22ND INTERNATIONAL VACUUM ELECTRONICS CONFERENCE, 2021,
  • [4] Meander-Line Slow-Wave Structure on Dielectric Substrate for a Millimeter-Band Traveling-Wave Tube
    Torgashov, R. A.
    TECHNICAL PHYSICS LETTERS, 2020, 46 (12) : 1180 - 1183
  • [5] Meander-Line Slow-Wave Structure on Dielectric Substrate for a Millimeter-Band Traveling-Wave Tube
    R. A. Torgashov
    Technical Physics Letters, 2020, 46 : 1180 - 1183
  • [6] Development of a millimeter-band traveling-wave tube with a meander-line microstrip slow wave structure
    Ryskin, N. M.
    Starodubov, A., V
    Torgashov, R. A.
    Rozhnev, A. G.
    Pavlov, A. M.
    Galushka, V. V.
    Serdobintsev, A. A.
    Kozhevnikov, I. O.
    Ulisse, G.
    Krozer, V
    FOURTH INTERNATIONAL CONFERENCE ON TERAHERTZ AND MICROWAVE RADIATION: GENERATION, DETECTION, AND APPLICATIONS, 2020, 11582
  • [7] Development of Planar Slow-Wave Structures for Low-Voltage Millimeter-Band Vacuum Tubes
    Ryskin, Nikita M.
    Rozhnev, Andrey G.
    Starodubov, Andrey V.
    Serdobintsev, Alexey A.
    Torgashov, Roman A.
    Galushka, Victor V.
    Pavlov, Anton M.
    2018 43RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ), 2018,
  • [8] Study of Electrodynamic Parameters of the Planar Meander Slow-Wave Structures for THz Band Traveling Wave Tubes
    Benedik, Andrey I.
    Rozhnev, Andrey G.
    Ryskin, Nikita M.
    Torgashov, Gennadiy V.
    Sinitsyn, Nikolay I.
    Bushuev, Nikolay A.
    Shalae, Pavel D.
    2015 IEEE INTERNATIONAL VACUUM ELECTRONICS CONFERENCE (IVEC), 2015,
  • [9] The Planar Microstrip Slow-Wave Structure for a V-band Dual-Sheet-Beam Traveling-Wave Tube
    Torgashov, Roman A.
    Ryskin, Nikita M.
    2021 14TH UK-EUROPE-CHINA WORKSHOP ON MILLIMETRE-WAVES AND TERAHERTZ TECHNOLOGIES (UCMMT 2021), 2021,
  • [10] Development of Miniature Millimeter-Band Traveling-Wave Tubes with Sheet and Multiple Electron Beams
    Ryskin, Nikita M.
    Torgashov, Gennadiy, V
    Torgashov, Roman A.
    Ploskih, Andrey E.
    Rozhnev, Andrey G.
    Titov, Vladimir N.
    Starodubov, Andrey, V
    Navrotskiy, Igor A.
    Emelyanov, Valeriy V.
    2020 7TH ALL-RUSSIAN MICROWAVE CONFERENCE (RMC), 2020, : 94 - 97
12345