Development of PDMS-based flexible dry type SEMG electrodes by micromachining technologies

The authors developed PDMS (polydimethylsiloxane)-based dry type surface electromyography (SEMG) electrodes for myoelectric prosthetic hands. The SEMG electrodes were strongly recommended to be fabricated on a flexible substrate to be compatible with the surface of skin. In this study, the authors designed a bar-shaped dry-type flexible SEMG electrodes comprised of two input electrodes and a reference electrode on a flexible PDMS substrate to measure EMG signals. The space distance between each electrode with a size of 10 mm 9 2 mm was chosen to 18 mm to get optimal result according to the simulation result with taking into consideration the conduction velocity and the median frequency of EMG signals. Raw EMG signals were measured from Brachioradialis, Biceps brachii, deltoideus, and pectoralis major muscles, to drive the application of the myoelectric hand prosthesis. Measured raw EMG signals were transformed to root mean square (RMS) EMG signals using Acqknowledge4.2. The experimental peak voltage values of RMS EMG signals from Brachioradialis, Biceps brachii, deltoideus, and pectoralis major muscles were 2.96 V, 4.45 V, 1.74 V, and 2.62 V, respectively. Values from the dry type flexible SEMG electrodes showed higher peak values than a commercially available wet type Ag-AgCl electrode. The study shows that the PDMS-based flexible electrode devised for measuring myoelectric signals from the surface of skin is more useful for prosthetic hands because of its greater sensitivity and flexibility.