Cubic Sc1-xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)

被引:63
作者
Hoglund, Carina [1 ]
Bareno, Javier [1 ]
Birch, Jens [1 ]
Alling, Bjorn [2 ]
Czigany, Zsolt [3 ]
Hultman, Lars [1 ]
机构
[1] Linkoping Univ, Dept Phys Chem & Biol, IFM, Thin Film Phys Div, S-58183 Linkoping, Sweden
[2] Linkoping Univ, Dept Phys Chem & Biol, IFM, Theory & Modeling Div, S-58183 Linkoping, Sweden
[3] Hungarian Acad Sci, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary
基金
瑞典研究理事会;
关键词
INITIO MOLECULAR-DYNAMICS; ELECTRONIC-PROPERTIES; CRYSTALS; GROWTH; SCN; MICROSTRUCTURE; TRANSITION; EVOLUTION;
D O I
10.1063/1.3132862
中图分类号
O59 [应用物理学];
学科分类号
摘要
Reactive magnetron sputter epitaxy was used to deposit thin solid films of Sc1-xAlxN (0 <= x <= 1) onto MgO(111) substrates with ScN(111) seed layers. Stoichiometric films were deposited from elemental Sc and Al targets at substrate temperatures of 600 S C. The films were analyzed by Rutherford backscattering spectroscopy, elastic recoil detection analysis, x-ray diffraction, and transmission electron microscopy. Results show that rocksalt structure (c)-Sc1-xAlxN solid solutions with AlN molar fractions up to similar to 60% can be synthesized. For higher AlN contents, the system phase separates into c- and wurtzite structure (w)-Sc1-xAlxN domains. The w-domains are present in three different orientations relative to the seed layer, namely, Sc1-xAlxN(0001)parallel to ScN(111) with Sc1-xAlxN[(1) over bar2 (1) over bar0]parallel to ScN[1 (1) over bar0], Sc1-xAlxN(10 (1) over bar1)parallel to ScN(111) with Sc1-xAlxN[(1) over bar2 (1) over bar0]parallel to ScN[1 (1) over bar0], and Sc1-xAlxN(10 (1) over bar1)parallel to ScN(113). The results are compared to first-principles density functional theory calculations for the mixing enthalpies of c-, w-, and zinc blende Sc0.50Al0.50N solid solutions, yielding metastability with respect to phase separation for all temperatures below the melting points of AlN and ScN. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3132862]
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页数:7
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