Controllable growth of vertically oriented graphene for high sensitivity gas detection

被引：35

作者：

Li, Jiurong ^{[1
]}

Liu, Zhiduo ^{[2
]}

Guo, Qinglei ^{[3
,4
]}

Yang, Siwei ^{[5
]}

Xu, Anli ^{[5
]}

Wang, Ziwen ^{[6
]}

Wang, Gang ^{[1
]}

Wang, Yongqiang ^{[7
]}

Chen, Da ^{[1
]}

Ding, Guqiao ^{[1
,5
]}

机构：

[1] Ningbo Univ, Dept Microelect Sci & Engn, Fac Sci, Ningbo 315211, Zhejiang, Peoples R China

[2] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

[3] Shandong Univ, Ctr Nanoelect, Jinan 250100, Shandong, Peoples R China

[4] Shandong Univ, Sch Microelect, Jinan 250100, Shandong, Peoples R China

[5] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China

[6] Tianjin Univ, Tianjin Int Ctr Nano Particles & Nano Syst, Tianjin 300072, Peoples R China

[7] Los Alamos Natl Lab, Mat Sci & Technol Div, Los Alamos, NM 87545 USA

来源：

JOURNAL OF MATERIALS CHEMISTRY C | 2019年 / 7卷 / 20期

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

CARBON NANOWALLS; SURFACE MODIFICATION; ELECTRIC-FIELD; PLASMA; NANOSHEETS; DEPOSITION; MECHANISM; FILM;

D O I：

10.1039/c9tc01246j

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper sheds light on the effects of process parameters on the low-temperature growth of vertical graphene nano-petals (VGNPs) by plasma-assisted chemical vapor deposition (PACVD) at 550 degrees C without the presence of any catalyst or post-transfer treatment. The parameters include substrate temperature, plasma power and growth time. The significant influence of these variable parameters reveals the morphological evolution, growth rate and quality of VGNPs. Furthermore, the defect-guided growth mechanism of the VGNPs is discussed in detail. The as-grown VGNPs possess high hydrophobicity (water contact angle: 137 degrees) due to their unique physicochemical properties, ultra-high specific surface area, exposed sharp edges and non-stacking three-dimensional geometry. This study provides a methodology for optimizing the conditions to prepare VGNPs. A gas sensor exhibits superior sensitivity due to high specific surface area and a parts-per-trillion (ppt) level of NH3 detection capabilities and is directly manufactured on a SiO2 substrate with VGNPs. Moreover, Joule-heating expels molecules by physisorption from the vertical surface leading to fully reversible and low-power operation. Our study may provide new insights into the improved design of graphene-based sensing applications.

引用

页码：5995 / 6003

页数：9

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