Ablation enhancement of fused silica glass by femtosecond laser double-pulse Bessel beam

被引：7
作者：
Chu, Dongkai [1 ,2 ]
Yao, Peng [1 ,2 ]
Sun, Xiaoyan [3 ]
Yin, Kai [3 ,4 ]
Huang, Chuanzhen [1 ,2 ]
机构：
[1] Shandong Univ, Ctr Adv Jet Engn Technol CaJET, Sch Mech Engn, Jinan 250061, Shandong, Peoples R China
[2] Shandong Univ, Key Lab High Efficiency & Clean Mech Manufacture, Minist Educ, Jinan 250061, Shandong, Peoples R China
[3] Cent South Univ, Coll Mech & Elect Engn, State Key Lab High Performance Complex Mfg, Changsha 410083, Peoples R China
[4] Cent South Univ, Sch Phys & Elect, Hunan Key Lab Super Microstruct & Ultrafast Proc, Changsha 410083, Peoples R China
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS | 2020年 / 37卷 / 11期
基金：
中国国家自然科学基金;
关键词：
DYNAMICS CONTROL; FABRICATION; DIELECTRICS; MICROCHANNELS;
D O I：
10.1364/JOSAB.402425
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this study, the double-pulse Bessel beam ablation of fused silica glass is investigated. Compared to a conventional Bessel-Gauss beam, a double-pulse Bessel-Gauss beam can greatly enhance the photo-modification zone. As the time delay increases, the photo-modification zone first increases and then decreases. By optimizing the processing parameter, the photo-modification zone with a diameter in the range of 1.5-3 mu m and an aspect ratio of about 1500:1 can be fabricated. Compared to the zone processed by a single-pulse Bessel-Gauss beam, the photo-modification zone of a double-pulse Bessel-Gauss beam increases by a factor of 500. Furthermore, the processing parameter of the pulse energy distribution ratio is also investigated to optimize fabrication. In addition, the experimental results show that the obtained etching rate of the photo-modification zone processed by the double-pulse Bessel-Gauss beam with a time delay of 50 ps is four times that of the single-pulse Bessel-Gauss beam. As an application example, a microreaction cell is fabricated using a femtosecond laser, double-pulse Bessel-Gauss beam to demonstrate the advantage of the proposed method in fabricating three-dimensional microfunctional structures. (C) 2020 Optical Society of America
引用
收藏
页码：3535 / 3541
页数：7
相关论文
共 36 条
[1]   Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching [J].
Bellouard, Y ;
Said, A ;
Dugan, M ;
Bado, P .
OPTICS EXPRESS, 2004, 12 (10) :2120-2129
[2]   Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams [J].
Bhuyan, M. K. ;
Velpula, P. K. ;
Colombier, J. P. ;
Olivier, T. ;
Faure, N. ;
Stoian, R. .
APPLIED PHYSICS LETTERS, 2014, 104 (02)
[3]   High aspect ratio nanochannel machining using single shot femtosecond Bessel beams [J].
Bhuyan, M. K. ;
Courvoisier, F. ;
Lacourt, P. A. ;
Jacquot, M. ;
Salut, R. ;
Furfaro, L. ;
Dudley, J. M. .
APPLIED PHYSICS LETTERS, 2010, 97 (08)
[4]   Excitation and relaxation dynamics in dielectrics irradiated by an intense ultrashort laser pulse [J].
Brouwer, Nils ;
Rethfeld, Baerbel .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 2014, 31 (11) :C28-C35
[5]   Pulsed laser modification of transparent dielectrics: what can be foreseen and predicted by numerical simulations? [J].
Bulgakova, Nadezhda M. ;
Zhukov, Vladimir P. ;
Meshcheryakov, Yuri P. ;
Gemini, Laura ;
Brajer, Jan ;
Rostohar, Danijela ;
Mocek, Tomas .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 2014, 31 (11) :C8-C14
[6]   Spatial distribution of refractive index variations induced in bulk fused silica by single ultrashort and short laser pulses [J].
Burakov, I. M. ;
Bulgakova, N. M. ;
Stoian, R. ;
Mermillod-Blondin, A. ;
Audouard, E. ;
Rosenfeld, A. ;
Husakou, A. ;
Hertel, I. V. .
JOURNAL OF APPLIED PHYSICS, 2007, 101 (04)
[7]   Femtosecond laser pulse train interaction with dielectric materials [J].
Caulier, O. Dematteo ;
Mishchik, K. ;
Chimier, B. ;
Skupin, S. ;
Bourgeade, A. ;
Leger, C. Javaux ;
Kling, R. ;
Hoenninger, C. ;
Lopez, J. ;
Tikhonchuk, V. ;
Duchateau, G. .
APPLIED PHYSICS LETTERS, 2015, 107 (18)
[8]   Optical waveguides in crystalline dielectric materials produced by femtosecond- laser micromachining [J].
Chen, Feng ;
Vazquez de Aldana, J. R. .
LASER & PHOTONICS REVIEWS, 2014, 8 (02) :251-275
[9]   CO selective oxidation in a microchannel reactor for PEM fuel cell [J].
Chen, GW ;
Yuan, Q ;
Li, HQ ;
Li, SL .
CHEMICAL ENGINEERING JOURNAL, 2004, 101 (1-3) :101-106
[10]   Effect of double-pulse-laser polarization and time delay on laser-assisted etching of fused silica [J].
Chu, Dongkai ;
Sun, Xiaoyan ;
Dong, Xinran ;
Yin, Kai ;
Luo, Zhi ;
Chen, Guowei ;
Duan, Ji-An ;
Hu, Youwang ;
Zhao, Xinyu .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2017, 50 (46)
1234