Deposition model of the Si3N4 coating on hard alloys

被引：2
|
作者：
Panov, V. S. [1 ]
Shumenko, V. N. [1 ]
Klimenko, A. V. [1 ]
机构：
[1] Natl Univ Sci & Technol MISiS, Moscow 119049, Russia
来源：
RUSSIAN JOURNAL OF NON-FERROUS METALS | 2013年 / 54卷 / 06期
关键词：
gas-phase coating; Si3N4 silicon nitride; model;
D O I：
10.3103/S1067821213060217
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
The influence of the process temperature, the SiCl4/NH3 gas-phase ratio, and the gas-phase pressure on the equilibrium degree of transformation is investigated. A mathematical model of the dependence under study is selected to describe the experimental results and coefficients of equations are calculated.
引用
收藏
页码：555 / 558
页数：4
相关论文
共 50 条
  • [41] INTERFACIAL REACTIONS IN THE AL/SI3N4/SI AND AU/SI3N4/SI SYSTEMS
    EDELMAN, F
    GUTMANAS, E
    BRENER, R
    INTERFACES BETWEEN POLYMERS, METALS, AND CERAMICS, 1989, 153 : 77 - 82
  • [42] INDENTATION PLASTICITY AND FRACTURE OF SI3N4 CERAMIC ALLOYS
    LEWIS, MH
    FUNG, R
    TAPLIN, DMR
    JOURNAL OF MATERIALS SCIENCE, 1981, 16 (12) : 3437 - 3446
  • [43] Fabrication of dense β-Si3N4-based ceramic coating on porous Si3N4 ceramic
    Wang, Chao
    Wang, Hongjie
    Fan, Xingyu
    Zhou, Jun
    Xia, Hongyan
    Fan, Jinpeng
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2015, 35 (06) : 1743 - 1750
  • [44] EFFECTS OF SURFACE PRETREATMENT OF POLYSILICON ELECTRODE PRIOR TO SI3N4 DEPOSITION ON THE ELECTRICAL CHARACTERISTICS OF SI3N4 DIELECTRIC FILMS
    YOON, GW
    JOSHI, AB
    KWONG, DL
    MATHEWS, VK
    THAKUR, RPS
    FAZAN, PC
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (03) : 347 - 351
  • [45] Fabrication of α-Si3N4 nanobelts assembled by Si3N4 microcrystals on the nanowires via crystallization of amorphous Si3N4 powders
    Hu, Zunlan
    Ge, Yiyao
    Liu, Jian
    Xie, Zhipeng
    CERAMICS INTERNATIONAL, 2019, 45 (12) : 15758 - 15762
  • [46] Comparison of tribological behavior between α-Sialon/Si3N4 and Si3N4/Si3N4 sliding pairs in water lubrication
    Rani, DA
    Yoshizawa, Y
    Jones, MI
    Hyuga, H
    Hirao, K
    Yamauchi, Y
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2005, 88 (06) : 1655 - 1658
  • [47] Characterization of grain alignment in Si3N4(w)/Si3N4 composites
    Zou, LH
    Park, DS
    Cho, BU
    Huang, Y
    Kim, HD
    MATERIALS LETTERS, 2004, 58 (10) : 1587 - 1592
  • [48] The Si3N4 and Si3N4/TiC layered composites by slip casting
    Yeh, CH
    Hon, MH
    CERAMICS INTERNATIONAL, 1997, 23 (04) : 361 - 366
  • [49] Mechanical properties of Si3N4 + β-Si3N4 whisker reinforced ceramics
    Dusza, J.
    Sajgalik, P.
    Journal of the European Ceramic Society, 1992, 9 (01) : 9 - 17
  • [50] An investigation into a multilayered BN/Si3N4/BN interfacial coating
    Coons, Timothy P.
    Reutenauer, Justin W.
    Flandermeyer, Brian
    Kmetz, Michael A.
    Prevost, Erica
    Suib, Steven L.
    JOURNAL OF MATERIALS SCIENCE, 2013, 48 (18) : 6194 - 6202
12345