Deposition model of the Si3N4 coating on hard alloys

被引：2
|
作者：
Panov, V. S. [1 ]
Shumenko, V. N. [1 ]
Klimenko, A. V. [1 ]
机构：
[1] Natl Univ Sci & Technol MISiS, Moscow 119049, Russia
来源：
RUSSIAN JOURNAL OF NON-FERROUS METALS | 2013年 / 54卷 / 06期
关键词：
gas-phase coating; Si3N4 silicon nitride; model;
D O I：
10.3103/S1067821213060217
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
The influence of the process temperature, the SiCl4/NH3 gas-phase ratio, and the gas-phase pressure on the equilibrium degree of transformation is investigated. A mathematical model of the dependence under study is selected to describe the experimental results and coefficients of equations are calculated.
引用
收藏
页码：555 / 558
页数：4
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