A Sensitivity-Enhanced Electric Field Sensor with Electrostatic Field Bias

被引：0
|
作者：
Wu, Xiaoming [1 ]
Huang, Jing'ao [1 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
2017 IEEE SENSORS | 2017年
基金：
北京市自然科学基金;
关键词：
electric field sensor; electrostatic field bias; electret; piezoelectric;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An electrostatic field biased cantilever electric field sensor with sensitivity improvement is proposed in this paper. Theoretically, the sensitivity of the sensor is proportional to the applied electrostatic field strength. A demonstrated sensor is developed, which consists of a Silicon cantilever coated with an Aluminum Nitride (AlN) piezoelectric film for signal readout, and a PTFE electret layer for electrostatic field bias. When the surface potential of the electret layer is -683 V, the sensitivity of the cantilever electric field sensor reaches 15.8 mV/(kV/m), and the resolution is about 20 V/m.
引用
收藏
页码：798 / 800
页数：3
相关论文
共 50 条
  • [1] A novel high-sensitivity electrostatic biased electric field sensor
    Huang, Jing'ao
    Wu, Xiaoming
    Wang, Xiaohong
    Yan, Xiaojun
    Lin, Liwei
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (09)
  • [2] A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology
    Gao, Yahao
    Peng, Simin
    Liu, Xiangming
    Liu, Yufei
    Zhang, Wei
    Peng, Chunrong
    Xia, Shanhong
    MICROMACHINES, 2024, 15 (03)
  • [3] Design of a lithium niobate electric field sensor with improved sensitivity
    Zhang, Jiahong
    Lei, Hongyi
    SENSORS AND ACTUATORS A-PHYSICAL, 2023, 362
  • [4] Enhanced Sensitivity and Stability of a Novel Resonant MEMS Electric Field Sensor Based on Closed-Loop Feedback
    Liu, Xiangming
    Wang, Zilong
    Wu, Zhengwei
    Gao, Yahao
    Peng, Simin
    Ren, Ren
    Zheng, Fengjie
    Lv, Yao
    Yang, Pengfei
    Wen, Xiaolong
    Xia, Shanhong
    Peng, Chunrong
    IEEE SENSORS JOURNAL, 2021, 21 (20) : 22536 - 22543
  • [5] A MEMS-based Electric Field Sensor with Self-compensation for Sensitivity Drift
    Chu, Zhaozhi
    Yang, Pengfei
    Wen, Xiaolong
    Peng, Chunrong
    Liu, Yutao
    Wu, Shuang
    JOURNAL OF ELECTRONICS & INFORMATION TECHNOLOGY, 2023, 45 (08) : 3040 - 3046
  • [6] Power-frequency Electric Field Measurement Using a Micromachined Electric Field Sensor
    Tong Jie
    Lei Yuqing
    Liu Guohua
    Wang He
    Jin Xueming
    Yang Pengfei
    Peng Chunrong
    JOURNAL OF ELECTRONICS & INFORMATION TECHNOLOGY, 2018, 40 (12) : 3036 - 3041
  • [7] Modeling and Simulation Analysis of Silicon-based Miniature Electrostatic Resonant DC Electric Field Sensor
    Hou J.
    Wu G.
    Cui Y.
    Zhao L.
    Li L.
    Zhongguo Dianji Gongcheng Xuebao/Proceedings of the Chinese Society of Electrical Engineering, 2021, 41 (01): : 374 - 382
  • [8] Thermally driven miniature electric field sensor
    Chen, Xianxiang
    Peng, Chunrong
    Ye, Chao
    Tao, Hu
    Bai, Qiang
    Chen, Shaofeng
    Xia, Shanhong
    2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 258 - 261
  • [9] Optical bias angle control method for electric field sensor using Mach-Zehnder interferometer
    Kobayashi, R
    Tajima, K
    Kuwabara, N
    Tokuda, M
    ELECTRONICS AND COMMUNICATIONS IN JAPAN PART I-COMMUNICATIONS, 2000, 83 (08): : 53 - 61
  • [10] ELECTRIC FIELD SENSOR WITH STABILIZED INTERFEROMETRIC READOUT
    Besic, Hajrudin
    Kainz, Andreas
    Kahr, Matthias
    Hortschitz, Wilfried
    Keplinger, Franz
    2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, : 1311 - 1314
12345