共 50 条
- [12] Columnar structured amorphous carbon nitride films PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7 NO 3-4, 2010, 7 (3-4): : 797 - 800
- [15] Internal stress of amorphous carbon nitride films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (03): : 1773 - 1775
- [16] Dielectric properties of amorphous carbon nitride films AMORPHOUS AND NANOSTRUCTURED CARBON, 2000, 593 : 493 - 498
- [17] SPUTTERED AMORPHOUS-CARBON NITRIDE FILMS JOURNAL OF MATERIALS RESEARCH, 1995, 10 (12) : 3079 - 3083
- [20] HIGH-FIELD CONDUCTIVITY OF AMORPHOUS INSULATOR FILMS PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1979, 52 (01): : 47 - 57