Near-infrared light absorption enhancement in Ge nanostructures prepared by nanosphere lithography

被引:4
作者
Shao, Wenyi
Xu, Jun [1 ]
Chen, Jiaming
Wu, Xiaoxiang
Chen, Kunji
机构
[1] Nanjing Univ, Natl Lab Solid State Microstruct, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2018年 / 36卷 / 04期
关键词
SOLAR-CELLS; ASPECT-RATIO; ANTIREFLECTION; DEPOSITION;
D O I
10.1116/1.5029435
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nanosphere lithography technique has been used to get Ge nanostructures for enhancing the optical absorption in the near-infrared light region. It is proved that the morphologies of formed Ge nanostructures can be well controlled by diameter of polystyrene nanosphere as well as the etching time. A good antireflection and enhanced optical absorption characteristics have been observed in a wide spectral range, which is strongly dependent of the surface morphology. Particularly, by using the nanosphere with the diameter of 2000 nm, the reflection in the near-infrared spectral range (900-1500 nm), which cannot be efficiently utilized by Si, is suppressed and the corresponding optical absorption is enhanced significantly. The finite-difference time-domain simulation shows that, for the incident light with short wavelength, the light can only be absorbed at the surface range; but for the incident light with a long wavelength (1500 nm), the light can be efficiently absorbed in whole Ge nanostructures. Compared with the Ge nanostructure formed by using small-sized nanospheres (300 nm), the one formed by a large-sized nanosphere (2000 nm) shows the better optical absorption behaviors due to the strong Mie scattering effect. Published by the AVS.
引用
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页数:6
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