Field emission studies of diamond-like films grown by RFCVD

被引：17
|
作者：
Lue, JT
Chen, SY
Chen, CL
Lin, MC
机构：
[1] Natl Tsing Hua Univ, Dept Phys, Hsinchu 300, Taiwan
[2] Natl Tsing Hua Univ, Dept Elect Engn, Hsinchu 300, Taiwan
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 2000年 / 265卷 / 03期
关键词：
D O I：
10.1016/S0022-3093(00)00006-5
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Hydrogenated amorphous carbon films (a-C:H) prepared by radio-frequency plasma-enhanced chemical vapor deposition are expected to have practical uses in electro-optics devices. The exceptionally low electron work function makes it a promising material for uses in field emission devices. This work demonstrated that hydrogen gas annealed and boron-doped diamond-like films deposited on gold silicide surfaces increase the field emission efficiency greatly. (C) 2000 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码：230 / 237
页数：8
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