Effects of heat treatment on fluorine-doped tin oxide anti-reflection films coated on silicon spheres

被引：1

作者：

Shirahata, Yasuhiro ^{[1
]}

Oku, Takeo ^{[1
]}

Kanamori, Youichi ^{[2
]}

Murozono, Mikio ^{[2
]}

机构：

[1] Univ Shiga Prefecture, Dept Mat Sci, Hikone, Shiga 5228533, Japan

[2] Clean Venture 21 Corp, Minami Ku, 38 Ishihara Douno Ushirocho, Kyoto 6018355, Japan

来源：

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 2017年 / 125卷 / 03期

基金：

日本科学技术振兴机构;

关键词：

Tin oxide; Fluorine; Annealing; Spherical silicon; SOLAR-CELLS; SNO2; MICROSTRUCTURE; DEPOSITION; MECHANISM; DESIGN;

D O I：

10.2109/jcersj2.16195

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Fluorine-doped tin oxide (SnOx: F-y) anti-reflection films coated on the surface of silicon spheres were investigated to clarify the effects of heat treatment on the microstructure and optical properties of the SnOx: F-y films. The lattice constants, crystallite size, and bandgap of the SnOx: F-y films depended on both heat treatment temperature and time. Fluorescence spectra of the SnOx: F-y films showed a broad luminescence peak associated with point defects in the films. These results were attributed to the dependence of the O and F contents in the SnOx: F-y crystals on heat treatment conditions. (C) 2017 The Ceramic Society of Japan. All rights reserved.

引用

页码：145 / 149

页数：5

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