Effects of heat treatment on fluorine-doped tin oxide anti-reflection films coated on silicon spheres

被引:1
作者
Shirahata, Yasuhiro [1 ]
Oku, Takeo [1 ]
Kanamori, Youichi [2 ]
Murozono, Mikio [2 ]
机构
[1] Univ Shiga Prefecture, Dept Mat Sci, Hikone, Shiga 5228533, Japan
[2] Clean Venture 21 Corp, Minami Ku, 38 Ishihara Douno Ushirocho, Kyoto 6018355, Japan
基金
日本科学技术振兴机构;
关键词
Tin oxide; Fluorine; Annealing; Spherical silicon; SOLAR-CELLS; SNO2; MICROSTRUCTURE; DEPOSITION; MECHANISM; DESIGN;
D O I
10.2109/jcersj2.16195
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Fluorine-doped tin oxide (SnOx: F-y) anti-reflection films coated on the surface of silicon spheres were investigated to clarify the effects of heat treatment on the microstructure and optical properties of the SnOx: F-y films. The lattice constants, crystallite size, and bandgap of the SnOx: F-y films depended on both heat treatment temperature and time. Fluorescence spectra of the SnOx: F-y films showed a broad luminescence peak associated with point defects in the films. These results were attributed to the dependence of the O and F contents in the SnOx: F-y crystals on heat treatment conditions. (C) 2017 The Ceramic Society of Japan. All rights reserved.
引用
收藏
页码:145 / 149
页数:5
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