An optimised dynamic bottleneck dispatching policy for semiconductor wafer fabrication

被引：13
|
作者：
Zhang, Huai [1 ]
Jiang, Zhibin [1 ]
Guo, Chengtao [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Dept Ind Engn & Management, Shanghai 200240, Peoples R China
来源：
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH | 2009年 / 47卷 / 12期
基金：
中国国家自然科学基金;
关键词：
dynamic bottleneck dispatching (DBD); semiconductor wafer fabrication system (SWFS); response surface methodology (RSM); simulation optimisation; PERFORMANCE EVALUATION; PETRI-NET; SIMULATION; DESIGN;
D O I：
10.1080/00207540701805638
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A dynamic bottleneck dispatching (DBD) policy is designed in this paper to detect bottlenecks in a timely way and make adaptive dispatching decisions of semiconductor wafer fabrication systems according to the real-time conditions. Control parameters of the proposed DBD algorithm are optimised by response surface methodology (RSM) and desirability functions. Numerical results show that DBD outperforms common scheduling rules such as CR + FIFO, EDD, SRPT, SPT, SPNB and an existing dynamic bottleneck dispatching method.
引用
收藏
页码：3333 / 3343
页数：11
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