Single-electron tunneling through amorphous carbon dots array

被引:11
作者
Miura, N [1 ]
Numaguchi, T [1 ]
Yamada, A [1 ]
Konagai, M [1 ]
Shirakashi, J [1 ]
机构
[1] ELECTROTECH LAB, TSUKUBA, IBARAKI 305, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1997年 / 36卷 / 12A期
关键词
electron-beam-induced deposition; carbon dots; single-electron tunneling; Coulomb blockade; Coulomb staircase;
D O I
10.1143/JJAP.36.L1619
中图分类号
O59 [应用物理学];
学科分类号
摘要
Minute amorphous carbon dots were fabricated by electron-beam-induced deposition (EBID) carried out in a scanning electron microscope (SEM) system. The use of residual hydrocarbon molecules as a precursor enabled easy nanostructure fabrication. By optimizing electron-beam conditions, dots with a diameter of as small as 40 nm were successfully obtained. They were arranged in series between fine metal electrodes to form a device with multiple-tunnel junctions. Single-electron charging effects, such as the Coulomb blockade and the Coulomb staircase, were clearly observed at 9.4 K.
引用
收藏
页码:L1619 / L1621
页数:3
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