An Optimized PDMS Thin Film Immersed Fabry-Perot Fiber Optic Pressure Sensor for Sensitivity Enhancement

被引:36
作者
Luo, Cheng [1 ,2 ]
Liu, Xiangnan [2 ]
Liu, Jinrong [3 ]
Shen, Jian [1 ,2 ]
Li, Hui [1 ,2 ]
Zhang, Shubin [2 ]
Hu, Jiabin [2 ]
Zhang, Qi [2 ]
Wang, Guanjun [1 ,2 ]
Huang, Mengxing [1 ,2 ,4 ]
机构
[1] Hainan Univ, State Key Lab Marine Resource Utilizat South Chin, Haikou 570228, Hainan, Peoples R China
[2] Hainan Univ, Collage Informat & Commun Engn, Haikou 570228, Hainan, Peoples R China
[3] Univ Elect Sci & Technol China, Sch Optoelect Sci & Engn, Chengdu 611731, Sichuan, Peoples R China
[4] Hainan Univ, Collage Comp & Cyberspace Secur, Haikou 570228, Hainan, Peoples R China
基金
中国国家自然科学基金;
关键词
PDMS thin film; Fabry-Perot; pressure sensor; TEMPERATURE; INTERFEROMETER;
D O I
10.3390/coatings9050290
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
To effectively control the critical thickness of a polydimethylsiloxane (PDMS) film and enhance the sensitivity characteristics of the fiber pressure sensor, we propose a new method to optimize the thickness of the PDMS film in a fiber tube. It is characterized by analyzing the relationship between the diffusion rate of the PDMS and its viscosity, and using an oven to solidify the PDMS to a certain extent to accurately control the diffusion rate and diffusion length of the PDMS in the fiber tube. We also used multiple transfer methods to control the volume of the PDMS in the fiber tube to minimize the thickness of the formed PDMS film. Fabry-Perot interference occurs when the surface of the PDMS film layer filled into the fiber tube and the adjacent single mode fiber/fiber tube form a joint surface. This method forms a new fiber-optic Fabry-Perot pressure sensor that is very sensitive to external pressure parameters. The experimental results show that the optimized film thickness will be reduced to an order of 20 mu m. Correspondingly, the fiber-optic pressure sensor has a sensitivity of up to 100 pm/kPa, which is about 100 times that reported in the literature. The structure also has better resistance to temperature interference. To our knowledge, this is the first in-depth study of the effects of the PDMS viscosity coefficient, diffusion rate, and fiber pressure sensitivity in fiber. The film thickness optimization method has some advantages, including a low cost, good controllability, and good application value in high sensitivity pressure and sound wave detection.
引用
收藏
页数:10
相关论文
共 20 条
[1]   High sensitivity temperature sensor based on fiber air-microbubble Fabry-Perot interferometer with PDMS-filled hollow-core fiber [J].
Chen, Mao-qing ;
Zhao, Yong ;
Xia, Feng ;
Peng, Yun ;
Tong, Rui-jie .
SENSORS AND ACTUATORS A-PHYSICAL, 2018, 275 :60-66
[2]   Cost-effective optical fiber pressure sensor based on intrinsic Fabry-Perot interferometric micro-cavities [J].
Fatima Domingues, M. ;
Rodriguez, Camilo A. ;
Martins, Joana ;
Tavares, Catia ;
Marques, Carlos ;
Alberto, Nelia ;
Andre, Paulo ;
Antunes, Paulo .
OPTICAL FIBER TECHNOLOGY, 2018, 42 :56-62
[3]   Highly-sensitive optical fiber temperature sensors based on PDMS/silica hybrid fiber structures [J].
Gao, Han ;
Hu, Haifeng ;
Zhao, Yong ;
Li, Jin ;
Lei, Ming ;
Zhang, Yong .
SENSORS AND ACTUATORS A-PHYSICAL, 2018, 284 :22-27
[4]   A Single-Ended Ultra-Thin Spherical Microbubble Based on the Improved Critical-State Pressure-Assisted Arc Discharge Method [J].
Guo, Wenfeng ;
Liu, Jianxun ;
Liu, Jinrong ;
Wang, Gao ;
Wang, Guanjun ;
Huang, Mengxing .
COATINGS, 2019, 9 (02)
[5]   A diaphragm-type fiber Bragg grating pressure sensor with temperature compensation [J].
Huang, Jun ;
Zhou, Zude ;
Wen, Xiaoyan ;
Zhang, Dongsheng .
MEASUREMENT, 2013, 46 (03) :1041-1046
[6]   Design and Optimization of an Opened Suspended Core Fiber-Based SPR Sensor with Gold Cylinder Structures [J].
Jiao, Wentan ;
Liu, Jinrong ;
Zhang, Jing ;
Wang, Guanjun ;
Huang, Mengxing .
APPLIED SCIENCES-BASEL, 2018, 8 (04)
[7]   Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement [J].
Liao, Changrui ;
Liu, Shen ;
Xu, Lei ;
Wang, Chao ;
Wang, Yiping ;
Li, Zhengyong ;
Wang, Qiao ;
Wang, D. N. .
OPTICS LETTERS, 2014, 39 (10) :2827-2830
[8]   Simultaneous measurement of gas pressure and temperature with integrated optical fiber FPI sensor based on in-fiber micro-cavity and fiber-tip [J].
Liu, Yinggang ;
Zhang, Ting ;
Wang, Yuxi ;
Yang, Danqing ;
Liu, Xin ;
Fu, Haiwei ;
Jia, Zhenan .
OPTICAL FIBER TECHNOLOGY, 2018, 46 :77-82
[9]   Design, fabrication and testing of fiber bragg grating based fixed guided beam pressure sensor [J].
Manuvinakurake, Manjunath ;
Gandhi, Uma ;
Mangalanathan, Umapathy ;
Nayak, Manjunath .
OPTIK, 2018, 158 :1063-1072
[10]   Piezoelectroluminescent fiber-optic sensors for temperature and deformation fields [J].
Pan'kov, Andrey A. .
SENSORS AND ACTUATORS A-PHYSICAL, 2019, 288 :171-176