Determination of Refractive Index and Thickness of Nanosized Amorphous Carbon Films Via Visible Range Reflectance Spectra

被引：2
|
作者：
Dabaghyan, G. A. [1 ]
Matevosyan, L. M. [2 ]
Avjyan, K. E. [2 ]
机构：
[1] Natl Polytech Univ Armenia, Yerevan, Armenia
[2] NAS Armenia, Inst Radiophys & Elect, Ashtarak, Armenia
来源：
JOURNAL OF CONTEMPORARY PHYSICS-ARMENIAN ACADEMY OF SCIENCES | 2019年 / 54卷 / 02期
关键词：
refractive index; nanosized film; amorphous carbon; pulsed laser deposition; DIAMOND-LIKE CARBON; COATINGS; GAAS;
D O I：
10.3103/S1068337219020105
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The values of thickness and refractive index (1.92 < n(f) < 2.19) of amorphous nanosized carbon films obtained on a crystalline silicon substrate by a pulsed laser deposition were experimentally determined via an analysis of visible range of reflection spectra. Manufactured films can be used as single-layer anti-reflective coatings for Si and GaAs semiconductors.
引用
收藏
页码：185 / 187
页数：3
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