Leveraging mainstream design and analysis tools for MEMS

被引：0

作者：

Mirman, I ^{[1
]}

Flanders, D ^{[1
]}

机构：

[1] SolidWorks Corp, Concord, MA USA

来源：

NSTI NANOTECH 2004, VOL 3, TECHNICAL PROCEEDINGS | 2004年

关键词：

MEMS; CAD; FEA;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Mainstream CAD/CAE tools are used to rapidly design and commercialize a broad product line of rugged MEMS-based optoelectronic devices for applications including telecom, oil and gas production, process monitoring, medical diagnostics, and scientific discovery. These tools deliver the robust capabilities previously available only with specialized, often expensive, MEMS-focused options. This paper illustrates some of the considerations in choosing a MEMS CAD/CAE tool, and provides examples of mainstream tools successfully used in MEMS design and analysis.

引用

页码：514 / 517

页数：4