Mesoscale laser 3D printing

被引:119
|
作者
Jonusauskas, Linas [1 ,2 ]
Gailevicius, Darius [1 ]
Rekstyte, Sima [1 ]
Baldacchini, Tommaso [3 ]
Juodkazis, Saulius [4 ,5 ,6 ]
Malinauskas, Mangirdas [1 ,6 ]
机构
[1] Vilnius Univ, Phys Fac, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
[2] Femtika Ltd, Sauletekio Ave 15, LT-10224 Vilnius, Lithuania
[3] Chapman Univ, Schmid Coll Sci & Technol, One Univ Dr, Orange, CA 92866 USA
[4] Swinburne Univ Technol, Fac Engn & Ind Sci, Ctr Microphoton, Hawthorn, Vic, Australia
[5] Australian Natl Fabricat Facil, Melbourne Ctr Nanofabricat, Clayton, Vic, Australia
[6] Tokyo Inst Technol, Sch Mat & Chem Technol, Tokyo Tech World Res Hub Initiat WRHI, Meguro Ku, 2-12-1 Ookayama, Tokyo 1528550, Japan
来源
OPTICS EXPRESS | 2019年 / 27卷 / 11期
基金
澳大利亚研究理事会;
关键词
POLYMERIZATION; MICROFABRICATION; METAMATERIALS; PERFORMANCE; FABRICATION;
D O I
10.1364/OE.27.015205
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
3D meso scale structures that can reach up to centimeters in overall size but retain micro- or nano-features, proved to be promising in various science fields ranging from micro-mechanical metamaterials to photonics and bio-medical scaffolds. In this work, we present synchronization of the linear and galvanometric scanners for efficient femtosecond 3D optical printing of objects at the meso-scale (from sub-mu m to sub-cm spanning live orders of magnitude). In such configuration, the linear stages provide stitch-free structuring at nearly limitless (up to tens-of-cm) working area, while galvo-scanners allow achieving translation velocities in the range of mm/s-cm/s without sacrificing nano-scale positioning accuracy and preserving the undistorted shape of the final print. The principle behind this approach is demonstrated, proving its inherent advantages in comparison to separate use of only linear stages or scanners. The printing rate is calculated in terms of voxels/s, showcasing the capability to maintain an optimal feature size while increasing throughput. Full capabilities of this approach are demonstrated by fabricating structures that reach millimeters in size but still retain sub-mu m features: scaffolds for cell growth, microlenses, and photonic crystals. All this is combined into a benchmark structure: a meso-butterfly. Provided results show that synchronization of two scan modes is crucial for the end goal of industrial-scale implementation of this technology and makes the laser printing well aligned with similar approaches in nanolabrication by electron and ion beams. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:15205 / 15221
页数:17
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