Molecular glass resists for scanning probe lithography

被引：14

作者：

Neuber, Christian ^{[1
]}

Ringk, Andreas ^{[1
]}

Kolb, Tristan ^{[1
]}

Wieberger, Florian ^{[1
]}

Strohriegl, Peter ^{[1
]}

Schmidt, Hans-Werner ^{[1
]}

Fokkema, Vincent ^{[2
]}

Cooke, Mike ^{[3
]}

Rawlings, Colin ^{[4
]}

Duerig, Urs ^{[4
]}

Knoll, Armin ^{[4
]}

de Marneffe, Jean-Francois ^{[5
]}

De Schepper, Peter ^{[5
,6
]}

Kaestner, Marcus ^{[7
]}

Krivoshapkina, Yana ^{[7
]}

Budden, Matthias ^{[7
]}

Rangelow, Ivo W. ^{[7
]}

机构：

[1] Univ Bayreuth, D-95440 Bayreuth, Germany

[2] VSL Dutch Metrol Inst, Delft, Netherlands

[3] Oxford Instruments Nanotechnol Tools Ltd, Oxford, England

[4] IBM Res, CH-8803 Ruschlikon, Switzerland

[5] IMEC, B-3001 Heverlee, Belgium

[6] Katholieke Univ Leuven, Dept Chem, B-3001 Heverlee, Belgium

[7] Tech Univ Ilmenau, D-98693 Ilmenau, Germany

来源：

ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES VI | 2014年 / 9049卷

关键词：

molecular glass resist; scanning probe lithography; physical vapor deposition; etch transfer; FILM-FORMING PROPERTIES; HIGH-RESOLUTION; LIGHT-SENSITIVITY; DERIVATIVES;

D O I：

10.1117/12.2047108

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The presented work deals with molecular glass resist materials based on (i) calix[4] resorcinarene resist systems, (ii) twisted fully aromatic biscarbazole-biphenyl materials, and (iii) fully aromatic spiro resist materials as new promising materials for Scanning Probe Lithography (SPL). Because of the non-chemically amplified resist nature and the absence of corresponding material diffusion, the novel SPL resists have the potential to increase the patterning resolution capabilities at a simultaneous reduction of the edge roughness (LER). In addition, these low molecular weight molecular glasses offer the advantage of solvent-free film preparation by physical vapor deposition (PVD). The PVD prepared films offer a number of advantages compared to spin coated ones such as no more pinholes, defects, or residual solvent domains, which can locally affect the film properties. These high-quality PVD films are ideal candidates for the direct patterning by SPL tools. Presented highlights are the thermal scanning probe lithography (tSPL) investigations at IBM Research - Zurich and the patterning by using electric field, current controlled scanning probe lithography (EF-CC-SPL) at the Technical University of Ilmenau. Further investigations on film forming behavior, etch resistance, and etch transfer are presented. Owing to the high-resolution probe based patterning capability in combination with their improved etch selectivity compared to reference polymeric resists the presented molecular glass resists are highly promising candidates for lithography at the single nanometer digit level.

引用

页数：9

共 38 条

[1]

Agabekov V. E., 1996, Light-sensitive compounds in vacuum photolithographic processes, Patent No. [SU1351426A1, 1351426]

[2]

Azarko V. A., 1999, VESTSI NATS AKAD NAV, P63

[3] INVESTIGATION OF NEW DRY HIGH-SENSITIVE RESIST USING 100 KV ELECTRON LITHOGRAPHY [J].