Surface roughness of stainless-steel mirrors for focusing soft x rays

被引：27

作者：

Yashchuk, Valeriy V. ^{[1
]}

Gullikson, Eric M.

Howells, Malcolm R.

Irick, Steve C.

MacDowell, Alastair A.

McKinney, Wayne R.

Salmassi, Farhad

Warwick, Tony

Metz, James P.

Tonnessen, Thomas W.

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

[2] InSync Inc, Albuquerque, NM 87107 USA

来源：

APPLIED OPTICS | 2006年 / 45卷 / 20期

关键词：

D O I：

10.1364/AO.45.004833

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have used polished stainless steel as a mirror substrate to provide focusing of soft x rays in grazing-incidence reflection. The critical issue of the quality of the steel surface, polished and coated with gold, is discussed in detail. A comparison is made to a polished, gold-coated, electroless nickel surface, which provides a smoother finish. We used the surface height distributions, measured with an interferometric microscope and complemented by atomic-force microscope measurements, to compute power spectral densities and then to evaluate the surface roughness. The effects of roughness in reducing the specular reflectivity were verified by soft-x-ray measurements. (C) 2006 Optical Society of America.

引用

页码：4833 / 4842

页数：10

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