Precise control of Si(001) initial oxidation by translational kinetic energy of O2 molecules

被引：0
|
作者：
Teraoka, Y [1 ]
Yoshigoe, A [1 ]
机构：
[1] Japan Atom Energy Res Inst, Synchrotron Radiat Res Ctr, Mikazuki, Hyogo 6795148, Japan
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2001, DIGEST OF PAPERS | 2001年
关键词：
D O I：
10.1109/IMNC.2001.984112
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：108 / 109
页数：2
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