Novel optical structure for micromachined wavelength-selective and tunable InP based MOEMS

被引：0

作者：

Zhou, D ^{[1
]}

Sun, K ^{[1
]}

Garrigues, M ^{[1
]}

Leclercq, JL ^{[1
]}

Regreny, P ^{[1
]}

Peng, J ^{[1
]}

Viktorovitch, P ^{[1
]}

机构：

[1] Tsing Hua Univ, Dept Elect Engn, Beijing 100084, Peoples R China

来源：

2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST | 2002年

关键词：

MOEMS; photodetector; tunable; micromachined; InP; optoelectronics;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：203 / 204

页数：2

共 3 条

[1] Optical and mechanical design of an InP based tunable detector for gas sensing applications [J].

Bondavalli, P ;

Benyattou, T ;

Garrigues, M ;

Leclercq, JL ;

Regreny, P ;

Sun, K ;

Viktorovitch, P ;

Cortial, S ;

Hugon, X ;

Pautet, C .

MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MEMS, 1999, 3878 :174-184

[2] Highly selective and widely tunable 1.55-μm InP/air-gap micromachined Fabry-Perot filter for optical communications [J].

Spisser, A ;

Ledantec, R ;

Seassal, C ;

Leclercq, JL ;

Benyattou, T ;

Rondi, D ;

Blondeau, R ;

Guillot, G ;

Viktorovitch, P .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1998, 10 (09) :1259-1261

[3]

VIKTOROVITCH P, 2001, MICR NAN ENG 2001 GR

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