Mesoporous indium tin oxide (ITO) films

被引:13
作者
Pohl, Annika [1 ]
Dunn, Bruce [1 ]
机构
[1] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
基金
美国国家科学基金会;
关键词
indium tin oxide (ITO); mesoporous materials; transparent conducting oxide (TCO);
D O I
10.1016/j.tsf.2005.12.195
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have developed a route to mesostructured indium tin oxide (ITO) films. The films, with the In/Sn atomic ratio of 9: 1, were prepared using cetyltrimethylammonium (CTAB) as templating agent. Substrates of silicon and quartz and borosilicate glasses were spin-coated with an ethanol-CTAB solution of indium and tin chlorides, followed by heat treatment in air. Characterization was performed using X-ray diffraction, scanning electron microscopy, and infrared spectroscopy. The CTAB template could be removed with retention of the mesostructure, by heat treatment at 300 degrees C, yielding a material with pore walls of single-phase cubic bixbyite structure and a mesoporous d-spacing of 4.4 nm. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:790 / 792
页数:3
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