Subaperture stitching interferometry for testing mild aspheres

被引:56
|
作者
Murphy, Paul [1 ]
Fleig, Jon [1 ]
Forbes, Greg [1 ]
Miladinovic, Dragisha [1 ]
DeVries, Gary [1 ]
O'Donohue, Stephen [1 ]
机构
[1] QED Technol, 1040 Univ Ave, Rochester, NY 14607 USA
来源
INTERFEROMETRY XIII: APPLICATIONS | 2006年 / 6293卷
关键词
interferometry; subaperture stitching; metrology; asphere; SSI (R);
D O I
10.1117/12.680473
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Interferometric tests of aspheres have traditionally relied on so-called "null correctors". These usually require significant time and expense to design and fabricate, and are specific to a particular asphere prescription. What's more, they are tedious to align and calibrate. Aspheres can also be tested without null correction (using a spherical wavefront), but such capability is extremely limited. A typical interferometer can acquire only a few micrometers of fourth-order aspheric departure due to high-density interference fringes. Furthermore, standard software packages do not compensate for the impact upon a non-null measurement of (i) the part's aspheric shape or (ii) the interferometer's optical aberrations. While fringe density and asphere compensation severely limit the practical utility of a non-null asphere measurement, subaperture stitching can directly address these issues. In 2004, QED Technologies introduced the Subaperture Stitching Interferometer (SSI (R)) to automatically stitch spherical surfaces (including hemispheres). The system also boosts accuracy with in-line calibration of systematic errors. We have recently added aspheric capability, extending non-null aspheric test capability by an order of magnitude or more. As demonstrated in the past on annular zones of nearly nulled data, subaperture stitching can extend the testable aspheric departure. We present a more generally applicable and robust method of stitching non-null aspheric phase measurements. By exploiting novel compensation schemes and in-line system error calibration, our subaperture stitching system can provide significantly better accuracy and increased testable aspheric departure over an unstitched non-null test. Examples of stitched non-null tests are analyzed in this paper, and cross-tested against corresponding null tests.
引用
收藏
页数:10
相关论文
共 50 条
  • [21] Subaperture stitching algorithms: A comparison
    Chen, Shanyong
    Xue, Shuai
    Wang, Guilin
    Tian, Ye
    OPTICS COMMUNICATIONS, 2017, 390 : 61 - 71
  • [22] Aspheric Subaperture Stitching Interferometry with Single-Wedge Variable Compensation
    Zong, Yi
    Sun, Shengyao
    Shi, Xiyuan
    Yu, Caiyun
    Liu, Yixuan
    Duan, Mingliang
    Li, Jianxin
    ACTA OPTICA SINICA, 2024, 44 (20)
  • [23] Subaperture testing technique of aspheres based on counter-rotating phase plates
    Chen, S. (mesychen@yahoo.cn), 1600, Chinese Optical Society (33):
  • [24] Form deviations caused by lateral displacement errors in annular subaperture stitching interferometry
    Schake, Markus
    Riebeling, Joerg
    Ehret, Gerd
    OPTICAL ENGINEERING, 2020, 59 (12)
  • [25] Non-null annular subaperture stitching interferometry for steep aspheric measurement
    Zhang, Lei
    Tian, Chao
    Liu, Dong
    Shi, Tu
    Yang, Yongying
    Wu, Hanshuo
    Shen, Yibing
    APPLIED OPTICS, 2014, 53 (25) : 5755 - 5762
  • [26] Sensitivity coefficient for monitoring residual surface error in plane subaperture stitching interferometry
    Xu, Xudong
    Shen, Zhengxiang
    Wang, Zhanshan
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2018, 29 (08)
  • [27] Experimental study on subaperture stitching testing of convex hyperboloid surface
    Zhu, Deyan
    Yan, Lisong
    Wang, Xiaokun
    Li, Ming
    Ma, Donglin
    Chao, Lianying
    OPTICS COMMUNICATIONS, 2018, 428 : 104 - 109
  • [28] Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching
    Gao, Fen
    Jiang, Zhuangde
    Zhao, Zixin
    Li, Bing
    OPTICAL ENGINEERING, 2015, 54 (01)
  • [29] Effect of Reference Surface Error on Subaperture Stitching for Flat Optics
    Li Mengyang
    Cao Tingfen
    Yuan Xiaodong
    Zhang Jinli
    Liu Changchun
    Yi Congzhi
    Chen Haiping
    Quan Xusong
    CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2019, 46 (12):
  • [30] Hybrid self-calibration method for reference surface elimination in subaperture stitching interferometry
    Liu, WeiJian
    Gao, Zhishan
    Wang, Ruoyan
    Che, Xiaoyu
    Wang, Lingjie
    Lei, Lihua
    Guo, Zhenyan
    Yuan, Qun
    OPTICS COMMUNICATIONS, 2022, 517