Adaptive Fresnel mirror for ultrashort-pulse laser beam shaping

被引：0

作者：

Brunne, Jens ^{[1
]}

Wapler, Matthias ^{[1
]}

Wallrabe, Ulrike ^{[1
]}

Treffer, Alexander ^{[2
]}

Bock, Martin ^{[2
]}

Grunwald, Ruediger ^{[2
]}

机构：

[1] Univ Freiburg, IMTEK, Dept Microsyst Engn, Lab Microactuators, Hugstetter Str 55, D-79106 Freiburg, Germany

[2] Max Born Inst Nonlinear Opt & Short Pulse Spectro, Berlin, Germany

来源：

2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT) | 2012年

关键词：

Adaptive Fresnel mirror; nanomachining; femtosecond laser machining; LIPSS; piezoelectric MOEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this contribution we present a fast and robust adaptive Fresnel mirror for advanced nanomachining applications with femtosecond lasers. The Fresnel mirror consists of two mirror segments that are actuated with a piezoelectric bimorph. All components are fabricated by low-cost rapid prototyping processes without the need for a clean-room. Light propagation and pulse transfer have been characterized as well as the static and dynamic actuation properties.

引用

页数：2