Improvement of a-Si solar cell properties by using SnO2:F TCO films coated with an ultra-thin TiO2 layer prepared by APCVD

被引:44
作者
Kambe, M. [1 ]
Fukawa, M. [1 ]
Taneda, N. [1 ]
Sato, K. [1 ]
机构
[1] Asahi Glass Co Ltd, Res Ctr, Kanagawa Ku, Yokohama, Kanagawa 2218755, Japan
关键词
transparent conductive oxide; titanium oxide; open circuit voltage;
D O I
10.1016/j.solmat.2006.06.008
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
TiO2-overcoated SnO2:F transparent conductive oxide films were prepared by atmospheric pressure chemical vapor deposition (APCVD) and an effect of TiO2 layer thickness on a-Si solar cell properties was investigated. The optical properties and the structure of the TiO2 films were evaluated by spectroscopic ellipsometry and X-ray difractometry. a-Si thin film solar cells were fabricated on the SnO2:F films over-coated with TiO2 films of various thicknesses (1.0, 1.5 and 2.0 nm) and I-V characteristics of these cells were measured under 1 sun (100mW/cm(2) AM-1.5) illumination. It was found that the TiO2 film deposited by APCVD has a refractive index of 2.4 at 550 nm and anatase crystal structure. The conversion efficiency of the a-Si solar cell fabricated on the 2.0 nm TiO2 overcoated SnO2:F film increased by 3%, which is mainly attributed to an increase in open circuit voltage (V-OC) of 30 mV. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:3014 / 3020
页数:7
相关论文
共 9 条
[1]   Properties of Ga-doped ZnO films [J].
Miyazaki, M ;
Sato, K ;
Mitsui, A ;
Nishimura, H .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1997, 218 :323-328
[2]   Passivation of oxygen-related donors in microcrystalline silicon by low temperature deposition [J].
Nasuno, Y ;
Kondo, M ;
Matsuda, A .
APPLIED PHYSICS LETTERS, 2001, 78 (16) :2330-2332
[3]   Hydrogen-radical durability of TiO2 thin films for protecting transparent conducting oxide for Si thin film solar cells [J].
Natsuhara, H ;
Ohashi, T ;
Ogawa, S ;
Yoshida, N ;
Itoh, T ;
Nonomura, S ;
Fukawa, M ;
Sato, K .
THIN SOLID FILMS, 2003, 430 (1-2) :253-256
[4]  
OHASHI T, 2002, P JSAP 49 SPR M TOK, P927
[5]  
Rahtu A, 2002, CHEM VAPOR DEPOS, V8, P21, DOI 10.1002/1521-3862(20020116)8:1<21::AID-CVDE21>3.0.CO
[6]  
2-0
[7]   THE EFFECT OF INTERPOSING THIN OXIDE LAYERS ON THE PHOTOVOLTAIC PROPERTIES OF A-SI-H SOLAR-CELLS .1. BETWEEN A-SI-H AND TRANSPARENT CONDUCTIVE OXIDE LAYERS [J].
SAKAI, Y ;
FUKUYAMA, K ;
MATSUMURA, M ;
NAKATO, Y ;
TSUBOMURA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (06) :880-882
[8]  
SZCZYRBOWSKI J, 1997, P 40 ANN TECHN C SOC, P237
[9]   Device grade microcrystalline silicon owing to reduced oxygen contamination [J].
Torres, P ;
Meier, J ;
Fluckiger, R ;
Kroll, U ;
Selvan, JAA ;
Keppner, H ;
Shah, A ;
Littelwood, SD ;
Kelly, IE ;
Giannoules, P .
APPLIED PHYSICS LETTERS, 1996, 69 (10) :1373-1375