Power dependence of electron density at various pressures in inductively coupled plasmas

被引：6

作者：

Kim, June Young ^{[1
]}

Kim, Dong-Hwan ^{[1
]}

Kim, Ju Ho ^{[2
]}

Jeon, Sang-Bum ^{[2
]}

Cho, Sung-Won ^{[2
]}

Chung, Chin-Wook ^{[2
]}

机构：

[1] Hanyang Univ, Dept Nanoscale Semicond Engn, Seoul 133791, South Korea

[2] Hanyang Univ, Dept Elect Engn, Seoul 133791, South Korea

来源：

PHYSICS OF PLASMAS | 2014年 / 21卷 / 11期

基金：

新加坡国家研究基金会;

关键词：

ENERGY DISTRIBUTION FUNCTION; HEATING-MODE TRANSITION; GLOBAL-MODEL; ARGON; DISCHARGE; PARAMETERS;

D O I：

10.1063/1.4901305

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Experimental observation of the electron density variation in inductively coupled plasmas with the electron energy probability function (EEPFs) was performed at various gas pressures at two RF powers (25W and 200 W). The measured EEPFs at high power discharges (200 W) showed a Maxwellian distribution, while evolution of the EEPFs from a bi-Maxwellian distribution to a Druyvesteyn-like distribution was observed at low RF powers (25 W) with increasing pressure. A discrepancy of the electron density variation between the two RF powers was observed. This difference is explained by the modified collisional loss and the Bohm velocity from the EEPF of the bi-Maxwellian distribution and the Druyvesteyn-like distribution. (C) 2014 AIP Publishing LLC.

引用

页数：5

共 17 条

[11] E-H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas [J].