共 15 条
[3]
Diffrient N., 1974, HUMANSCALE
[6]
Microfluidic MEMS for semiconductor processing
[J].
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING,
1998, 21 (04)
:329-337
[9]
Laminated plastic microfluidic components for biological and chemical systems
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1999, 17 (04)
:2264-2269