Micromachining of a silicon multichannel microprobe for neural electrical activity recording

被引：11

作者：

Moldovan, C ^{[1
]}

Ilian, V ^{[1
]}

Constantin, G ^{[1
]}

Iosub, R ^{[1
]}

Modreanu, M ^{[1
]}

Dinoiu, I ^{[1
]}

Firtat, B ^{[1
]}

Voitincu, C ^{[1
]}

机构：

[1] Natl Inst Res & Dev Microtechnol, Dept Multidisciplinary, Bucharest 72225, Romania

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 99卷 / 1-2期

关键词：

multichannel microprobe; design; micromachining; anisotropic etching;

D O I：

10.1016/S0924-4247(01)00901-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The cellular potential recording permits the investigation of the central nervous activity. The paper presents the design and manufacturing steps of an eight-channel microprobe for recording the electrical activity of neural cells and tissues integrated on the same cl-Lip with the electronics. The specific fabrication processes of the integrated microprobe are presented. An implantable neural microprobe is developed to enable the correlation between electrical activity in the human nervous system and externally psycho-electrical stimuli. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：119 / 124

页数：6

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