Influence of hydrogen on nanocrystalline diamond surfaces investigated with HREELS and XPS

被引：11

作者：

Haensel, Thomas ^{[1
,2
]}

Uhlig, Jens ^{[1
,2
]}

Koch, Roland J. ^{[1
,2
]}

Ahmed, Syed Imad-Uddin ^{[1
,2
]}

Garrido, Jose A. ^{[3
]}

Steinmueller-Nethl, Doris ^{[4
]}

Stutzmann, Martin ^{[3
]}

Schaefer, Juergen A. ^{[1
,2
]}

机构：

[1] Tech Univ Ilmenau, Inst Phys, D-98684 Ilmenau, Germany

[2] Tech Univ Ilmenau, Inst Mikro & Nanotechnol, D-98684 Ilmenau, Germany

[3] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany

[4] Rho BeSt Coating Hartstoffbeschichtungs GmbH, A-6020 Innsbruck, Austria

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2009年 / 206卷 / 09期

关键词：

ELECTRON-ENERGY-LOSS; VIBRATIONS; GROWTH; VAPOR; BARE;

D O I：

10.1002/pssa.200982202

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanocrystalline diamond (NCD) films are of great importance for many applications. They can be implemented as transparent protective coatings or for the use in electronic devices, sensor systems, and bioelectronic systems. In many applications the surface properties dictate the eventual performance of the device and, therefore, need to be thoroughly understood. This paper is devoted to investigating the changes occurring in the vibrational structure and surface chemical composition of hydrogen-containing NCD films as a function of annealing treatments as well as exposure to atomic hydrogen. High resolution electron energy loss spectroscopy (HREELS) as a surface sensitive method was utilized to analyze the temperature-correlated desorption of hydrogen and graphitization of the surface. These measurements were correlated with X-ray-induced photoelectron spectroscopy (XPS) measurements to study the chemical composition. Results indicate that water and graphitic-like contaminations are removed from the sample surface after annealing up to about 350 degrees C. Annealing the sample up to 950 degrees C decreases the hydrogen content drastically. At temperatures up to 1050 degrees C the C-H stretching and bending modes are not detectable, indicating that the hydrogen is totally removed from the surface. Analysis of the C Is XPS spectra revealed that a graphitic-like phase is formed. An atomic hydrogen treatment was applied to get further information about the surface composition. Additionally, from our HREELS and XPS data we are able to determine the sp(2)/sp(3) ratio for the different surface treatments. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：2022 / 2027

页数：6

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