A ROTARY MICROACTUATOR SUPPORTED ON ENCAPSULATED MICROBALL BEARINGS USING AN ELECTRO-PNEUMATIC THRUST BALANCE

被引：3

作者：

McCarthy, M. ^{[1
]}

Waits, C. M. ^{[2
]}

Beyaz, M. I. ^{[1
]}

Ghodssi, R. ^{[1
]}

机构：

[1] Univ Maryland, College Pk, MD 20742 USA

[2] US Army Res Lab, Adelphi, MD USA

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

D O I：

10.1109/MEMSYS.2009.4805578

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The development of a rotary microactuator supported on encapsulated microball bearings and driven by electro-pneumatic actuation is reported. The encapsulated bearing provides full support to an encased rotor, while an electro-pneumatic thrust balance is used to minimize normal load, and therefore bearing friction. Experimental results show excellent agreement with predictions, demonstrating the ability to operate at optimal normal loads up to 2000rpm. This is the first demonstration of a ball bearing supported electrostatic microactuator with a fully encased rotor, capable of being integrated within practical microsystems. The fully-supported rotor allows for direct mechanical attachment or reliable interaction with external media and is a necessity for useful implementation.

引用

页码：1095 / 1098

页数：4

共 7 条

[1]

GHALICHECHIAN N, 2007, SENSOR ACTUAT A-PHYS, V136, P416

[2] Design, fabrication, and characterization of a rotary micromotor supported on microball bearings [J].