Parametric Resonance in Electrostatically Actuated Micromirrors

被引：35

作者：

Frangi, Attilio ^{[1
]}

Guerrieri, Andrea ^{[1
]}

Carminati, Roberto ^{[2
]}

Mendicino, Gianluca ^{[2
]}

机构：

[1] Politecn Milan, Dept Civil & Environm Engn, I-20133 Milan, Italy

[2] STMicroelectronics, MSH Div, I-20010 Cornaredo, Italy

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS | 2017年 / 64卷 / 02期

关键词：

Continuation approaches; Mathieu equation; micromirrors; microoptoelectromechanical systems (MOEMS); parametric resonance; TORSIONAL MICROMIRROR; AMPLIFICATION; OSCILLATORS; MEMS; EXCITATION; SENSOR;

D O I：

10.1109/TIE.2016.2615274

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

We consider an electrostatically actuated torsional micromirror, a key element of recent optical microdevices. The mechanical response is analyzed with specific emphasis on its nonlinear features. We show that the mirror motion is an example of parametric resonance, activated when the drive frequency is twice the natural frequency of the system. The numerical model, solved with a continuation approach, is validated with very good accuracy through an extensive experimental campaign.

引用

页码：1544 / 1551

页数：8

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