Spray pyrolysis deposition of undoped SnO2 and In2O3 films and their structural properties

被引：29
|
作者：
Korotcenkov, G. [1 ]
Cho, B. K. [1 ]
机构：
[1] Gwangju Inst Sci & Technol, Sch Mat Sci & Engn, 123 Cheomdangwagi Ro, Gwangju 61005, South Korea
来源：
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS | 2017年 / 63卷 / 01期
基金：
新加坡国家研究基金会;
关键词：
Morphology; Grain size; Rate of growth; Texturing; Thickness; Faceting; Stress; OXIDE THIN-FILMS; INDIUM TIN OXIDE; CHEMICAL-VAPOR-DEPOSITION; FIELD-EFFECT TRANSISTORS; OPTICAL-PROPERTIES; ELECTRICAL-PROPERTIES; PHYSICAL-PROPERTIES; SUBSTRATE-TEMPERATURE; GROWTH-MECHANISM; DIOXIDE FILMS;
D O I：
10.1016/j.pcrysgrow.2016.12.001
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
In this paper the results of structural analysis of the SnO2 and In2O3 films deposited by spray pyrolysis are presented. The main goals of this analysis are summarizing the results obtained in this field, highlighting a correlation between parameters of film deposition and the material structure and formulating some general regularities, typical for metal oxides. Peculiarities arid mechanisms of pyrosol deposition as well as advantages and disadvantages of this technology for deposition of the films with required parameters were also discussed. It is shown that this technology has great potential for controlling structural parameters of metal oxides such as thickness, the grain size, texturing, roughness, the grain faceting and the porosity. (C) 2017 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1 / 47
页数：47
相关论文
共 50 条
  • [31] Crystallographic characterization of In2O3 films deposited by spray pyrolysis
    Korotcenkov, G
    Brinzari, V
    Cerneavschi, A
    Cornet, A
    Morante, J
    Cabot, A
    Arbiol, J
    SENSORS AND ACTUATORS B-CHEMICAL, 2002, 84 (01) : 37 - 42
  • [32] Solid solubility of SnO2 in In2O3
    Ohya, Y
    Ito, T
    Kaneko, M
    Ban, T
    Takahashi, Y
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2000, 108 (09) : 803 - 806
  • [33] Ozone and gamma radiation sensing properties of In2O3:ZnO:SnO2 thin films
    O. Korostynska
    K. Arshak
    G. Hickey
    E. Forde
    Microsystem Technologies, 2008, 14 : 557 - 566
  • [34] Electronic structures and optical properties of ZnO, SnO2 and In2O3
    Mi, Yiming
    Odaka, Hidefumi
    Iwata, Shuichi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (6 A): : 3453 - 3458
  • [35] Electronic structures and optical properties of ZnO, SnO2 and In2O3
    Mi, YM
    Odaka, H
    Iwata, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (6A): : 3453 - 3458
  • [36] Improved spray-pyrolysis deposition system for polycrystalline conductive SnO2 thin films
    Foglietti, V
    Galbato, A
    Bearzotti, A
    Galloppa, A
    Maltese, P
    POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II, 1996, 403 : 435 - 440
  • [37] Fabrication and spectral reflective properties of In2O3/SnO2 film
    Tian Qi-Xiang
    Liu Sheng-Chao
    ACTA PHYSICA SINICA, 2010, 59 (01) : 541 - 544
  • [38] Investigation of Structural, Optical, and Electrical Properties of In-Doped SnO2 Thin Films Deposited by Spray Pyrolysis
    Hadri, Adil
    El Hat, Abderrahim
    Sekkati, Mouaad
    Mzerd, Ahmed
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 14 NO 10, 2017, 14 (10):
  • [39] Structural, optical, electrical properties and FTIR studies of fluorine doped SnO2 films deposited by spray pyrolysis
    B. Zhang
    Y. Tian
    J. X. Zhang
    W. Cai
    Journal of Materials Science, 2011, 46 : 1884 - 1889
  • [40] Optical and structural properties of sno2 thin films deposited by spray pyrolysis technique: Effect of solution concentration
    Derrar K.
    Zaabat M.
    Zerrouk I.
    Hafdallah A.
    Rouabah N.
    Gasmi B.
    Defect and Diffusion Forum, 2019, 397 : 179 - 186
12345